 MOEMS includes two major technologies, microelectromechanical systems and micro-optics.Both these two technologies independently involve in batch processing similar to integrated circuits, and micromachining similar to fabrication of microsensor.MEMS offers inherently device miniaturization and wide applications in sensors and actuators, robotics, accelerometers, microvalves, flow controllers, global positioning systems (GPS) component miniaturization; and a host of other sensors and actuators for applications to space, air, land, and sea vehicles, as well as industrial, biotechnology, and consumer electronics

During the 1980s the acronym of MEMS created a fortune for publication, getting government contracts and publicity.