 MOEMS is an enabling technology for applications that cannot be addressed, using micro-optics alone and is currently playing a significant role in numerous optical applications.The trend toward miniaturization and integration of conventional optical systems will accelerate the adoption of MOEMS technology in commercialization of many industrial components which are today’s most desirable elements of optical communication.During 1991-1993, Dr. M. Edward Motamedi, a former Rockwell International innovator in the areas of both microelectromechanical systems and micro-optics, used internally the acronym of MOEMS for microoptoelectromechanical systems.