 Microoptoelectromechanical systems

Microoptoelectromechanical systems (MOEMS), also written as micro-opto-electro-mechanical systems or micro-optoelectromechanical systems, also known as optical microelectromechanical systems or optical MEMS, are not a special class of microelectromechanical systems (MEMS) but rather the combination of MEMS merged with micro-optics; this involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems.MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.