 This was to distinguish between optical MEMS and MOEMS, where optical MEMS could include bulk optics but MOEMS is truly based on microtechnology where MOEMS devices are batch-processed exactly like integrated circuits, but this is not true in most cases for optical MEMS.In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego.In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major microtechnologies; namely micro-optics, micromechanics, and microelectronics.