 Static secondary-ion mass spectrometry

Static secondary-ion mass spectrometry, or static SIMS is a secondary ion mass spectrometry technique for chemical analysis including elemental composition and chemical structure of the uppermost atomic or molecular layer of a solid which may be a metal, semiconductor or plastic with insignificant disturbance to its composition and structure.It is one of the two principal modes of operation of SIMS, which is the mass spectrometry of ionized particles emitted by a solid (or sometimes liquid) surface upon bombardment by energetic primary particles.