 Compared to other surface techniques, such as Auger and Photoelectron spectroscopy, SSIMS offers some unique features isotope sensitivity, hydrogen sensitivity, direct compound detection by molecular secondary ion emission and extremely high sensitivity, very often in the ppm range.However, one problem in static SIMS application may be quantification.This problem can be overcome by using a combination of electron spectroscopic techniques such as Auger electron spectroscopy (AES) and photoelectron spectroscopy (UPS or XPS) with static SIMS.