 The same year, Atalla proposed the concept of the MOS integrated circuit, which was an integrated circuit chip fabricated from MOSFETs.By 1964, MOS chips had reached higher transistor density and lower manufacturing costs than bipolar chips.MOS chips further increased in complexity at a rate predicted by Moore's law, leading to large-scale integration (LSI) with hundreds of transistors on a single MOS chip by the late 1960s.