 Commercial nanoelectronic semiconductor device fabrication began in the 2010s.In 2013, SK Hynix began commercial mass-production of a 16nm process, TSMC began production of a 16nm FinFET process, and Samsung Electronics began production of a 10nm process.TSMC began production of a 7 nm process in 2017, and Samsung began production of a 5 nm process in 2018.