 These developments led to the discovery of fullerenes in 1985 and the structural assignment of carbon nanotubes in 1991.The development of FinFET in the 1990s aldo laid the foundations for modern nanoelectronic semiconductor device fabrication.In 1960, Egyptian engineer Mohamed Atalla and Korean engineer Dawon Kahng at Bell Labs fabricated the first MOSFET (metal–oxide–semiconductor field-effect transistor) with a gate oxide thickness of 100 nm, along with a gate length of 20µm.