 Maximum linear writing speeds of up to 20 mm/s have been shown with throughputs in the 104 – 105 μm2 h−1 range which is comparable to single-column, Gaussian-shaped e-beam using HSQ as resist.The resolution of t-SPL is determined by the probe tip shape and not limited by the diffraction limit or by the focal spot size of beam approaches, however, tip-sample interactions during the in-situ metrology process create tip wear, limiting the lifetime of the probes.In order to extend the lifetime of the probe tips, Ultrananocrystalline diamond (UNCD) and Silicon-Carbide (SiC)-coated tips or wear-less floating contact imaging methods have been demonstrated.