 Thermal scanning probe lithography

Thermal scanning probe lithography (t-SPL) is a form of scanning probe lithography (SPL) whereby material is structured on the nanoscale using scanning probes, primarily through the application of thermal energy.Related fields are "thermo-mechanical" "SPL" (see also Millipede memory), "thermochemical" "SPL" (or thermochemical nanolithography) where the goal is to influence the local chemistry, and "thermal" dip-pen lithography as an additive technique.