 UMC has already used SONOS since 2006  and has licensed Cypress for 40 nm and other nodes.Shanghai Huali Microelectronics Corporation (HLMC) has also announced to be producing Cypress SONOS at 40 nm and 55 nm.In 2006, Toshiba developed a new double tunneling layer technology with SONOS structure, which utilize Si9N10 silicon nitride.