 In 1793, voivodeships of Breslauja and Merkinė (Merkinė was really part of Vinius, but considered nominally part of Smolensk) were created from northern part of it.Breslauja Voivodeship consisted from Breslauja, Vilkmergė and Anykščiai counties and Merkinė one consisted from Merkinė, Prienai and Eišiškės ones.After the partitions of the Polish–Lithuanian Commonwealth, the territory of Vilnius Voivodeship was incorporated into the Russian Empire, most of the territory becoming a part of Vilna Governorate.