 In 2010, a 3D resolution of 0.5±0.1×0.5±0.1×0.7±0.2 nm was achieved with a single-axis ADF-STEM tomography.Recently, atomic resolution in 3D electron tomography reconstructions has been demonstrated.ADF-STEM tomography has recently been used to directly visualize the atomic structure of screw dislocations in nanoparticles.