 GCIB smoothing of high voltage electrodes has been shown to reduce field electron emission, and GCIB treated RF cavities are being studied for use in future high energy particle accelerators .Small argon cluster GCIB sources are increasingly used for analytical depth-profiling by secondary ion mass spectrometry (SIMS) and x-ray photoelectron spectroscopy (XPS).Argon clusters greatly reduce the damage introduced to the specimen during depth-profiling, making it practical to do so for many organic and polymeric materials for the first time.