 Researchers at Massachusetts Institute of Technology have thus far succeeded in fabricating the parts for such a micro turbine out of six etched and stacked silicon wafers, and are working toward combining them into a functioning engine about the size of a U.S. quarter coin.Researchers at Georgia Tech have built a micro generator 10 mm wide, which spins a magnet above an array of coils fabricated on a silicon chip.The device spins at 100,000 revolutions per minute, and produces 1.1 watts of electrical power, sufficient to operate a cell phone.