f138b376__City_KR___Patent_applications__Description
[Patent application number] 20110165320 [Published] 07-07-2011 [Description] 
DEPOSITION SOURCE, THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS - A deposition source, a thin film deposition apparatus, and a method of manufacturing an organic light-emitting display apparatus, the deposition source including: a crucible to hold a deposition material; a heater to heat the deposition material; a nozzle unit disposed at a side of the crucible; a first connector disposed between the crucible and the nozzle unit; a first valve disposed on the first connector to control the flow of the deposition material to the nozzle unit; a deposition material recovery unit to collect the deposition material; a second connector to connect the first connector to the deposition material recovery unit; and a second valve to control the flow of the deposition material through the second connector.
Jong-Heon Kim, Yongin-City KR - Patent applications