26dcda7a_isplay_apparatus___Patents_com__Description
[Patent #] 2011/0244171 [Description] 
LOW EXPANSION GLASS SUBSTRATE FOR REFLECTION TYPE MASK AND METHOD FOR PROCESSING SAME The present invention relates to a low expansion glass substrate which serves as a substrate of a reflective mask used in a lithography step of semiconductor...
Applications filed at Oct 06 2011 | Coating composition, optical film, polarizing plate, and image display apparatus | Patents.com