b626bc89_tsugi_JP___Patent_applications__Description
[Patent application number] 20130153889 [Published] 06-20-2013 [Description] 
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - To manufacture a highly reliable semiconductor device by giving stable electric characteristics to a transistor. An oxide semiconductor film is deposited by a sputtering method with the use of a polycrystalline sputtering target. In that case, partial pressure of water in a deposition chamber before or in the deposition is set to be lower than or equal to 10
Kengo Akimoto, Atsugi JP - Patent applications