b626bc89_tsugi_JP___Patent_applications__Description
[Patent application number] 20140357018 [Published] 12-04-2014 [Description] 
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - To provide a method for manufacturing a thin film transistor in which contact resistance between an oxide semiconductor layer and source and drain electrode layers is small, the surfaces of the source and drain electrode layers are subjected to sputtering treatment with plasma and an oxide semiconductor layer containing In, Ga, and Zn is formed successively over the source and drain electrode layers without exposure of the source and drain electrode layers to air.
Kengo Akimoto, Atsugi JP - Patent applications