f138b376__City_KR___Patent_applications__Description
[Patent application number] 20120288619 [Published] 11-15-2012 [Description] 
ELECTROSTATIC CHUCK, THIN FILM DEPOSITION APPARATUS INCLUDING THE ELECTROSTATIC CHUCK, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS BY USING THE THIN FILM DEPOSITION APPARATUS - An electrostatic chuck, a thin film deposition apparatus including the electrostatic chuck, and a method of manufacturing an organic light emitting display apparatus using the thin film deposition apparatus. The electrostatic chuck includes: a first plate; a first common wire disposed on the first plate and electrically connected to a plus terminal of an electric power source; first electrode patterns electrically connected to the first common wire, separated by a distance from each other, and extending from the first common wire; a second common wire disposed on the first plate and electrically connected to a minus terminal of the electric power source; second electrode patterns electrically connected to the second common wire, separated by a distance from each other, and extending from the second common wire; a first additional wire electrically connected to the first common wire; and a second additional wire electrically connected to the second common wire.
Jong-Heon Kim, Yongin-City KR - Patent applications