870a94c6_carbon_nanotubes___Patents_com__Description
[Patent #] US-8,048,277 [Description] 
Magnet unit and magnetron sputtering apparatus A magnet unit, which can realize uniform film thickness distribution of a thin film formed on a substrate without increasing the length and width of a target....
Patents filed at Nov 01 2011 | Method for manufacturing thermal interface material having carbon nanotubes | Patents.com