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MEMS: small machines for the microelectronics age  Sign In
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subscriptions  3 Author(s) Koester, D.A. ; MCNC MEMS Technol.
Applications Center, Research Triangle Park, NC, USA ; Markus,
K.W. ; Walters, M.D.  In the past few years, the micro-
electromechanical systems (MEMS) industry has exceeded the
$1-billion-a-year mark. Some economic forecasters estimate that
the industry will surpass $14 billion by the year 2000. The
reason for this tremendous growth is the enabling nature of
MEMS, which give engineers and researchers the tools to build
things that have been impossible or prohibitively expensive with
other techniques. MEMS are micron- to millimeter-scale devices
that can be fabricated as discrete devices or in large arrays.
MEMS borrow much of their technology