The ECR ion source makes use of the electron cyclotron resonance to ionize a plasma. Microwaves are injected into a volume at the frequency corresponding to the electron cyclotron resonance, defined by the magnetic field applied to a region inside the volume. The volume contains a low pressure gas. The alternating electric field of the microwaves is set to be synchronous with the gyration period of the free electrons of the gas, and increases their perpendicular kinetic energy. Subsequently, when the energized free electrons collide with the gas in the volume they can cause ionization if their kinetic energy is larger than the ionization energy of the atoms or molecules. The ions produced correspond to the gas type used, which may be pure, a compound, or vapour of a solid or liquid material.