A surface-wave-sustained discharge is a plasma that is excited by propagation of electromagnetic surface waves. Surface wave plasma sources can be divided into two groups depending upon whether the plasma generates part of its own waveguide by ionisation or not. The former is called a self-guided plasma. The surface wave mode allows the generation of uniform high-frequency-excited plasmas in volumes whose lateral dimensions extend over several wavelengths of the electromagnetic wave, e.g. for microwaves of 2.45 GHz in vacuum the wavelength amounts to 12.2 cm.