The size and shape of nanoparticles are characterized using small angle X-ray scattering (SAXS). Nano-sized features on surfaces are measured with a similar technique, grazing-incidence small angle X-ray scattering (GISAXS). In this and other methods, surface sensitivity is achieved by placing the crystal surface at a small angle relative to the incident beam, which achieves total external reflection and minimizes the X-ray penetration into the material.