In 1995, John M. Guerra fabricated a sub-wavelength transparent grating (later called a photonic metamaterial) having 50 nm lines and spaces, and then coupled it with a standard oil immersion microscope objective (the combination later called a super-lens) to resolve a grating in a silicon wafer also having 50 nm lines and spaces. This super-resolved image was achieved with illumination having a wavelength of 650 nm in air.