A further step beyond superstructures and aperiodic materials is what is called diffuse scattering in electron diffraction patterns due to disorder, which is also known for x-ray or neutron scattering. This can occur from inelastic processes, for instance, in bulk silicon the atomic vibrations (phonons) are more prevalent along specific directions, which leads to streaks in diffraction patterns. Sometimes it is due to arrangements of point defects. Completely disordered substitutional point defects lead to a general background which is called Laue monotonic scattering. Often there is a probability distribution for the distances between point defects or what type of substitutional atom there is, which leads to distinct three-dimensional intensity features in diffraction patterns. An example of this is for a Nb 0.83 CoSb sample, with the diffraction pattern shown in Figure 16. Because of the vacancies at the niobium sites, there is diffuse intensity with snake-like structure due to correlations of the distances between vacancies and also the relaxation of Co and Sb atoms around these vacancies.