Nanofluidic devices have been built for application in chemistry, molecular biology and medicine. The main purposes to use nanofluidic devices are separation and measurement of solutions containing nanoparticles for drug delivery, gene therapy and nanoparticle toxicology on a micro-total-analysis system. An important advantage of micro- and nano-scaled systems is the small amount of sample or reagent used in analysis. This reduces the time required for sample processing. It is also possible to achieve analysis in an array, which further speeds up processes and increases throughput of analysis.