In particle physics there have been many devices used for tracking. These include cloud chambers (1920–1950), nuclear emulsion plates (1937–), bubble chambers (1952–), spark chambers (1954-), multi wire proportional chambers (1968–) and drift chambers (1971–), including time projection chambers (1974–). With the advent of semiconductors plus modern photolithography, solid state trackers, also called silicon trackers (1980–), are used in experiments requiring compact, high-precision, fast-readout tracking; for example, close to the primary interaction point in a collider like the LHC.