Photo-reflectance is a highly sensitive measurement technique and provides unmatched capability for characterizing the material and electronic properties of thin films. Photo-reflectance has been particularly important in basic research on semiconductors due to its ability to precisely determine semiconductor bandstructures (even at room temperature). As an optical technique, photo-reflectance would appear suited to industrial applications because it is non-contact, and because it has good spatial resolution. However, the need for spectroscopic information limits measurement speed, and consequently the adoption of spectroscopic photo-reflectance in industrial applications such as process control of microelectronics manufacturing.