Hot atoms are expected to play important roles in catalytic reactions. For example, a reaction of a hydrogen atom with hydrogen atoms on a silicon surface and a reaction of an oxygen atom with oxygen molecules on Pt(111) have been reported. Hot atoms can also be generated by degenerating molecules on a metal surface with UV light. It has been reported that the reactivity of an oxygen atom generated in such a way on a platinum surface is different from that of chemisorbed oxygen atoms. Elucidating the role of hot atoms on surfaces will lead to a deeper understanding of the mechanism of reactions.