The viscous flow regime of CVD is driven by a pressure gradient. CVD also includes a diffusion component distinct from the surface diffusion of adatoms. In CVD, reactants and products must also diffuse through a boundary layer of stagnant gas that exists next to the substrate. The total number of steps required for CVD film growth are gas phase diffusion of reactants through the boundary layer, adsorption and surface diffusion of adatoms, reactions on the substrate, and gas phase diffusion of products away through the boundary layer.