Several factors contribute to the damping of micro-electro-mechanical resonators, including fluid damping and solid damping. Anchor losses are a type of solid damping observed in resonators operating in various environments. When a resonator is fixed to a substrate, either directly or via other structures such as tethers, mechanical waves propagate into the substrate through these connections. The wave traveling through a perfectly elastic solid would have a constant energy and an isolated perfectly elastic solid once set into vibration would continue to vibrate indefinitely. Actual materials do not show such behavior and dissipation will happen due to some imperfection of elasticity within the body. In typical micro-resonators, the substrate dimensions are significantly larger than those of the resonator itself. Consequently, it can be approximated that all waves entering the substrate will attenuate without reflecting back to the resonator. In other words, the energy carried by the waves will dissipate, leading to damping. This phenomenon is referred to as anchor losses.