The thermionic vacuum arc (TVA) is a new type of plasma source, which generates a plasma containing ions with a directed energy. TVA discharges can be ignited in high-vacuum conditions between a heated cathode (electron gun) and an anode (tungsten crucible) containing the material. The accelerated electron beam, incident on the anode, heats the crucible, together with its contents, to a high temperature. After establishing a steady-state density of the evaporating anode material atoms, and when the voltage applied is high enough, a bright discharge is ignited between the electrodes.