List of semiconductor scale examples
Date Channel length Oxide thickness MOSFET type Researcher ( s ) Organization
October 1962 ? ? TFT Paul K. Weimer RCA Laboratories
1965 ? ? GaAs H. Becke , R. Hall , J . White RCA Laboratories
October 1966 100,000 nm 100 nm TFT T.P . Brody , H.E . Kunig Westinghouse Electric
August 1967 ? ? FGMOS Dawon Kahng , Simon Min Sze Bell Telephone Laboratories
October 1967 ? ? MNOS H.A . Richard Wegener , A.J . Lincoln , H.C. Pao Sperry Corporation
July 1968 ? ? BiMOS Hung-Chang Lin , Ramachandra R. Iyer Westinghouse Electric
October 1968 ? ? BiCMOS Hung-Chang Lin , Ramachandra R. Iyer , C.T . Ho Westinghouse Electric
1969 ? ? VMOS ? Hitachi
September 1969 ? ? DMOS Y. Tarui , Y. Hayashi , Toshihiro Sekigawa Electrotechnical Laboratory ( ETL )
October 1970 ? ? ISFET Piet Bergveld University of Twente
October 1970 1,000 nm ? DMOS Y. Tarui , Y. Hayashi , Toshihiro Sekigawa Electrotechnical Laboratory ( ETL )
1977 ? ? VDMOS John Louis Moll HP Labs
1977 ? ? LDMOS ? Hitachi
July 1979 ? ? IGBT Bantval Jayant Baliga , Margaret Lazeri General Electric
December 1984 2,000 nm ? BiCMOS H. Higuchi , Goro Kitsukawa , Takahide Ikeda , Y. Nishio Hitachi
May 1985 300 nm ? ? K. Deguchi , Kazuhiko Komatsu , M. Miyake , H. Namatsu Nippon Telegraph and Telephone
February 1985 1,000 nm ? BiCMOS H. Momose , Hideki Shibata , S. Saitoh , Jun-ichi Miyamoto Toshiba
November 1986 90 nm 8.3 nm ? Han-Sheng Lee , L.C . Puzio General Motors
December 1986 60 nm ? ? Ghavam G. Shahidi , Dimitri A. Antoniadis , Henry I. Smith MIT
May 1987 ? 10 nm ? Bijan Davari , Chung-Yu Ting , Kie Y. Ahn , S. Basavaiah IBM T.J. Watson Research Center
Timeline of MOSFET demonstrations -- Other types of MOSFET
The following is a list of semiconductor scale examples for various MOSFET (metal-oxide-semiconductor field-effect transistor, or MOS transistor) semiconductor manufacturing process nodes.