The PAS 5500 is a machine for carrying out this technique. One tool used in this general process uses  excited argon fluoride
The PAS 5500 is a machine for carrying out this technique. One tool used in this general process uses  excited argon fluoride. Both before this process and a preceding oxidation, the object to be worked on  undegoes RCA cleaning. This process uses spin coating to apply the necessary materials. The substrate in this  procedure is aligned using a stepper. One two phase method for extending the abilities of this method is double  patterning. Current plans call for this process to start using extreme ultraviolet in the next few years. Soft baking  removes solvents from the resists added in this procedure. The pattern transfer artificial used in this process is called  a mask. After this process, HF is applied to the substrate to etch it and later the wafer can be doped. For 10 points,  name this process of imposing the design for a microchip onto a piece of silicon.
The PAS 5500 is a machine for carrying out this technique. One tool used in this general process uses  excited argon fluoride.
photolithography [or nanolithography; or microlithography; prompt on “making a computer chip”]