FTP, identify this sticking of atoms onto a surface, which may be contrasted with absorption.
PEVD largely works by the dissociative version of this phenomenon, so its balance with its associative inverse provides the reaction isotherm for such deposition reactions with the occupancy fraction as a parameter.  The coefficient for this type of process is generally a decreasing function of the fractal dimension of a surface, and the coefficient of loss to the walls of a device is generally given as a product of a diffusion coefficient and coefficient for this process.  This bonding process has in chemi- and physi- varieties, which correspond to different types of wells in a surface's potential.  FTP, identify this sticking of atoms onto a surface, which may be contrasted with absorption.
PEVD largely works by the dissociative version of this phenomenon, so its balance with its associative inverse provides the reaction isotherm for such deposition reactions with the occupancy fraction as a parameter.  
adsorption (accept desorption in the first sentence; prompt on "sorption")