In this process, Knudsen effusion cells are used to evaporate or sublime a metal, and during this process growth is usually monitored via reflection high energy electron diffraction, or RHEED.
The genesis of this technique lies in the work of Joyce and Bradley with monosilane. One hazard in employing this process with gallium arsenide or aluminum gallium arsenide is the formation of a pit with or without a spike, a situation known as an oval defect. In this process, Knudsen effusion cells are used to evaporate or sublime a metal, and during this process growth is usually monitored via reflection high energy electron diffraction, or RHEED. This process has the advantage over chemical vapor deposition in that it allows for the use of a lower temperature, and unlike liquid-phase epitaxy it easily allows for the manufacturing of thin films, since its deposition rate is about one monolayer per second. For ten points, identify this technique in which evaporated metals in an ultra-high vacuum environment are directed, together with dopants, onto a substrate.
The genesis of this technique lies in the work of Joyce and Bradley with monosilane.
{molecular beam} epitaxy or {MBE}