1. Machining of precision parts

It mainly includes precision turning, mirror grinding and grinding. Micro turning is carried out on a precision lathe with a single crystal diamond turning tool which is finely ground. The cutting thickness is only about 1 micron.

 It is often used to process high-precision and smooth surface parts such as spherical, aspheric and flat mirrors of non-ferrous materials. For example, the aspheric mirror with a diameter of 800mm used for processing nuclear fusion devices has a maximum accuracy of 0.1 μ m and a surface roughness of rz0.05 μ M.

2. Precision parts processing

When the precision of precision parts is nanometer or even atomic unit (atomic lattice distance is 0.1-0.2 nanometer), the machining method of ultra precision parts can not adapt to it. It is necessary to use the machining method of special precision parts, that is, chemical energy, electrochemical energy, thermal energy or electric energy, to make these energies exceed the combined energy between atoms, so as to remove the surface defects of the workpiece In order to achieve the goal of ultra precision machining, the adhesion, combination or lattice deformation between atoms are studied. This kind of processing includes mechanical chemical polishing, ion sputtering and ion implantation, electron beam exposure, laser beam processing, metal evaporation and molecular beam epitaxy.