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Cold Atoms Could Replace Hot Gallium in Focused Ion Beams

For Immediate Release: November 12, 2008

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Contact: Mark Bello

Scientists at the National Institute of Standards and Technology (NIST) have developed a radical new method of focusing a stream of ions into a point as small as one nanometer (one billionth of a meter).* Because of the versatility of their approach—it can be used with a wide range of ions tailored to the task at hand—it is expected to have broad application in nanotechnology both for carving smaller features on semiconductors than now are possible and for nondestructive imaging of nanoscale structures with finer resolution than currently possible with electron microscopes.

NIST researcher Jabez McClelland

NIST researcher Jabez McClelland makes adjustments on the new magneto-optical trap ion source, capable of focusing beams of ions down to nanometer spots for use as a 'nano-scalpel' in advanced electronics processing.

Credit: Holmes, NIST
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The NIST team took a completely different approach to generating a focused ion beam that opens up the possibility for use of non-contaminating elements. Instead of starting with a sharp metal point, they generate a small “cloud” of atoms and then combine magnetic fields with laser light to trap and cool these atoms to extremely low temperatures. Another laser is used to ionize the atoms, and the charged particles are accelerated through a small hole to create a small but energetic beam of ions. Researchers have named the groundbreaking device “MOTIS,” for “Magneto-Optical Trap Ion Source.” (For more on MOTs, see “Bon MOT: Innovative Atom Trap Catches Highly Magnetic Atoms,” NIST Tech Beat Apr. 1, 2008.)


* J. L. Hanssen, S. B. Hill, J. Orloff and J. J. McClelland. Magneto-optical trap-based, high brightness ion source for use as a nanoscale probe. Nano Letters 8, 2844 (2008).