value to calculate and report controlled emissions, you must use either
a properly measured destruction or removal efficiency, or a class
average of properly measured destruction or removal efficiencies,
determined in accordance with procedures in paragraphs (f)(4)(i)
through (f)(4)(v) of this section.
    (i) A properly measured destruction or removal efficiency value
must be determined in accordance with EPA 430-R-10-003 (incorporated by
reference, see Sec.  98.7).
    (ii) You must annually select and properly measure the destruction
or removal efficiency for a random sample of abatement systems to
include in a random sampling abatement system testing program (RSASTP)
in accordance with procedures in paragraphs (f)(4)(ii)(A) and
(f)(4)(ii)(B) of this section.
    (A) Each reporting year for each abatement system class a random
sample of three or 20 percent of installed abatement systems, whichever
is greater, must be tested. If 20 percent of the total number of
abatement systems in each class does not equate to a whole number, the
number of systems to be tested must be determined by rounding up to the
nearest integer.
    (B) You must select the random sample each reporting year for the
RSASTP without repetition of previously-measured systems in the sample,
until all systems in each class are properly measured in a 5-year
period.
    (iii) If you have measured the destruction or removal efficiency of
a particular abatement system during the previous 2-year period, you
must calculate emissions from that system using the most recently
measured destruction or removal efficiency for that particular system.
    (iv) If the destruction or removal efficiency of an individual
abatement system has not been properly measured during the previous 2-
year period, you may use a simple average of the properly measured
destruction or removal efficiencies for systems of that class, in
accordance with the RSASTP. Your facility must maintain or exceed the
RSASTP schedule if you wish to apply class average destruction or
removal efficiency factors to abatement systems that have not yet been
properly measured.
    (v) If your facility uses redundant abatement systems, you may
account for the total abatement system uptime calculated for a specific
exhaust stream during the reporting year.
    (g) You must adhere to the QA/QC procedures of this paragraph when
calculating fluorinated GHG and N2O emissions from
electronics manufacturing production processes:

    (1) Follow the QA/QC procedures in the International SEMATECH
06124825A-ENG (incorporated by reference, see Sec.  98.7) when
measuring and calculating facility-specific, recipe-specific
fluorinated GHG and N2O utilization and by-product formation
rates.
    (2) Where you use facility-specific, recipe-specific fluorinated
GHG and N2O utilization and by-product formation rates
measured prior to January 1, 2007, verify that the QA/QC procedures in
the International SEMATECH 01104197A-XFR (incorporated by
reference, see Sec.  98.7) were followed during measurement and
calculation of the factors.
    (3) Follow the QA/QC procedures in accordance with those in EPA
430-R-10-003 (incorporated by reference, see Sec.  98.7) when
calculating abatement systems destruction or removal efficiencies.
    (4) Demonstrate that as part of normal facility operations the
inventory of gas stored in containers at the beginning of the reporting
year is the same as the inventory of gas stored in containers at the
end of the previous reporting year.
    (h) You must adhere to the QA/QC procedures of this paragraph (h)
when calculating annual gas consumption for each fluorinated GHG and
N2O used at your facility and fluorinated GHG emissions from
heat transfer fluid use.
    (1) Review all inputs to Equations I-11 and I-16 of this subpart to
ensure that all inputs and outputs are accounted for.
    (2) Do not enter negative inputs into the mass balance Equations I-
11 and I-16 of this subpart and ensure that no negative emissions are
calculated.
    (3) Ensure that the inventory at the beginning of one reporting
year is identical to the inventory reported at the end of the previous
reporting year.
    (4) Ensure that the total quantity of gas i in containers in
service at the end of a reporting year is accounted for as if the in-
service containers were full for Equation I-11 of this subpart. Ensure
also that the same quantity is accounted for in the inventory of input
gas i stored in containers at the beginning of the subsequent reporting
year.
    (i) All flowmeters, weigh scales, pressure gauges, and thermometers
used to measure quantities that are monitored under this section or
used in calculations under Sec.  98.93 must have an accuracy and
precision of one percent of full scale or better.

Sec.  98.95  Procedures for estimating missing data.

    (a) Except as provided in paragraph (b) of this section, a complete
record of all measured parameters used in the fluorinated GHG and
N2O emissions calculations in Sec.  98.93 and Sec.  98.94 is
required.
    (b) If you use heat transfer fluids at your facility and are
missing data for one or more of the parameters in Equation I-16 of this
subpart, you must estimate heat transfer fluid emissions using the
arithmetic average of the emission rates for the reporting year
immediately preceding the period of missing data and the months
immediately following the period of missing data. Alternatively, you
may estimate missing information using records from the heat transfer
fluid supplier. You must document the method used and values used for
all missing data values.

Sec.  98.96  Data reporting requirements.

    In addition to the information required by Sec.  98.3(c), you must
include in each annual report the following information for each
electronics manufacturing facility:
    (a) Annual manufacturing capacity of your facility as determined in
Equation I-5 of this subpart.
    (b) For facilities that manufacture semiconductors, the diameter of
wafers manufactured at your facility (mm).
    (c) Annual emissions of:
    (1) Each fluorinated GHG emitted from each process type for which
your facility is required to calculate emissions as calculated in
Equations I-6 and I-7 of this subpart.
    (2) Each fluorinated GHG emitted from each individual recipe
(including those in a set of similar recipes), or process sub-type as
calculated in Equations I-8 and I-9 of this subpart, as applicable.
    (3) N2O emitted from each chemical vapor deposition
process and from other N2O-using manufacturing processes as
calculated in Equation I-10 of this subpart.
    (4) Each heat transfer fluid emitted as calculated in Equation 1-16
of this subpart.
    (d) The method of emissions calculation used in Sec.  98.93.
    (e) Annual production in terms of substrate surface area (e.g.,
silicon, PV-cell, glass).
    (f) When you use factors for fluorinated GHG process utilization
and by-product formation rates other than the defaults provided in
Tables I-3, I-4, I-5, I-6, and I-7 to this subpart and/or
N2O utilization factors other than the defaults provided in
Table I-8 to this subpart, you must report the following, as
applicable:
    (1) The recipe-specific utilization and by-product formation rates
for each individual recipe (or set of similar recipes) and/or facility-
specific N2O utilization factors.
    (2) For recipe-specific utilization and by-product formation rates,
the film or substrate that was etched/cleaned and the feature type that
was etched, as applicable.
    (3) Certification that the recipes included in a set of similar
recipes are similar, as defined in Sec.  98.98.
    (4) Certification that the measurements for all reported recipe-
specific utilization and by-product formation rates and/or facility-
specific N2O utilization factors were made using the
International SEMATECH 06124825A-ENG (incorporated by
reference, see Sec.  98.7), or the International SEMATECH
01104197A-XFR (incorporated by reference, see Sec.  98.7) if
measurements were made prior to January 1, 2007.
    (5) Source of the recipe-specific utilization and by-product
formation rates and/or facility-specific-N2O utilization
factors.
    (6) Certification that the conditions under which the measurements
were made for facility-specific N2O utilization factors are
representative of your facility's N2O emitting production
processes.
    (g) Annual gas consumption for each fluorinated GHG and
N2O as calculated in Equation I-11 of this subpart,
including where your facility used less than 50 kg of a particular
fluorinated GHG or N2O during the reporting year. For all
fluorinated GHGs and N2O used at your facility for which you
have not calculated emissions using Equations I-6, I-7, I-8, I-9, and
I-10 of this subpart, the chemical name of the GHG used, the annual
consumption of the gas, and a brief description of its use.
    (h) All inputs used to calculate gas consumption in Equation I-11
of this subpart, for each fluorinated GHG and N2O used.
    (i) Disbursements for each fluorinated GHG and N2O
during the reporting year, as calculated using Equation I-12 of this
subpart.
    (j) All inputs used to calculate disbursements for each fluorinated
GHG and N2O used in Equation I-12 of this subpart, including
all facility-wide gas-specific heel factors used for each fluorinated
GHG and N2O. If your facility used less than 50 kg of a
particular fluorinated GHG during the reporting year, facility-wide
gas-specific heel factors do not need to be reported for those gases.
    (k) Annual amount of each fluorinated GHG consumed for each recipe,
process sub-type, or process type, as appropriate, and the annual
amount of

N2O consumed for each chemical vapor deposition and other
electronics manufacturing production processes, as calculated using
Equation I-13 of this subpart.
    (l) All apportioning factors used to apportion fluorinated GHG and
N2O consumption.
    (m) For the facility-specific apportioning model used to apportion
fluorinated GHG and N2O consumption under Sec.  98.94(c),
the following information to determine it is verified in accordance
with procedures in Sec.  98.94(c)(1) and (2):
    (i) Identification of the quantifiable metric used in your
facility-specific engineering model to apportion gas consumption.
    (ii) The start and end dates selected under Sec.  98.94(c)(2)(i).
    (iii) Certification that the gases you selected under Sec.
98.94(c)(2)(ii) correspond to the largest quantities consumed on a mass
basis, at your facility in the reporting year for the plasma etching
process type and the chamber cleaning process type.
    (iv) The result of the calculation comparing the actual and modeled
gas consumption under Sec.  98.94(c)(2)(iii).
    (n) Fraction of each fluorinated GHG or N2O fed into a
recipe, process sub-type, or process type that is fed into tools
connected to abatement systems.
    (o) Fraction of each fluorinated GHG or N2O destroyed or
removed in abatement systems connected to process tools where recipe,
process sub-type, or process type j is used, as well as all inputs and
calculations used to determine the inputs for Equation I-14 of this
subpart.
    (p) Inventory and description of all abatement systems through
which fluorinated GHGs or N2O flow at your facility,
including the number of devices of each manufacturer, model numbers,
manufacturer claimed fluorinated GHG and N2O destruction or
removal efficiencies, if any, and records of destruction or removal
efficiency measurements over their in-use lives. The inventory of
abatement systems must describe the tools with model numbers and the
recipe(s), process sub-type, or process type for which these systems
treat exhaust.
    (q) For each abatement system through which fluorinated GHGs or
N2O flow at your facility, for which you are reporting
controlled emissions, the following:
    (1) Certification that each abatement system has been installed,
maintained, and operated in accordance with manufacturers'
specifications.
    (2) All inputs and results of calculations made accounting for the
uptime of abatement systems used during the reporting year, in
accordance with Equations I-14 and I-15 of this subpart.
    (3) The default destruction or removal efficiency value or properly
measured destruction or removal efficiencies for each abatement system
used in the reporting year.
    (4) Where the default destruction or removal efficiency value is
used to report controlled emissions, certification that the abatement
systems for which emissions are being reported were specifically
designed for fluorinated GHG and N2O abatement. You must
support this certification by providing abatement system supplier
documentation stating that the system was designed for fluorinated GHG
and N2O abatement.
    (5) Where properly measured destruction or removal efficiencies or
class averages of destruction or removal efficiencies are used, the
following must also be reported:
    (i) A description of the class, including the abatement system
manufacturer and model number and the fluorinated GHG(s) and
N2O in the effluent stream.
    (ii) The total number of systems in that class for the reporting
year.
    (iii) The total number of systems for which destruction or removal
efficiency was properly measured in that class for the reporting year.
    (iv) A description of the calculation used to determine the class
average, including all inputs to the calculation.
    (v) A description of the method used for randomly selecting class
members for testing.
    (r) For heat transfer fluid emissions, inputs to the heat transfer
fluid mass balance equation, Equation I-16 of this subpart, for each
fluorinated GHG used.
    (s) Where missing data procedures were used to estimate inputs into
the heat transfer fluid mass balance equation under Sec.  98.95(b), the
number of times missing data procedures were followed in the reporting
year, the method used to estimate the missing data, and the estimates
of those data.
    (t) A brief description of each ``best available monitoring
method'' used according to Sec.  98.94(a), the parameter measured or
estimated using the method, and the time period during which the ``best
available monitoring method'' was used.

Sec.  98.97  Records that must be retained.

    In addition to the information required by Sec.  98.3(g), you must
retain the following records:
    (a) All data used and copies of calculations made as part of
estimating gas consumption and emissions, including all spreadsheets.
    (b) Documentation for the values used for fluorinated GHG and
N2O utilization and by-product formation rates. If you use
facility-specific and recipe-specific utilization and by-product
formation rates, the following records must also be retained, as
applicable:
    (1) Complete documentation and final report for measurements for
recipe-specific utilization and by-product formation rates
demonstrating that the values were measured using International
SEMATECH 06124825A-ENG (incorporated by reference, see Sec.
98.7) or, if the measurements were made prior to January 1, 2007,
International SEMATECH 01104197A-XFR (incorporated by
reference, see Sec.  98.7).
    (2) Documentation that recipe-specific utilization and by-product
formation rates developed for your facility are measured for recipes
that are similar to those used at your facility, as defined in Sec.
98.98. The documentation must include, at a minimum, recorded to the
appropriate number of significant figures, reactor pressure, flow
rates, chemical composition, applied RF power, direct current (DC)
bias, temperature, flow stabilization time, and duration.
    (3) Documentation that your facility's N2O measurements
are representative of the N2O emitting processes at your
facility.
    (4) The date and results of the initial and any subsequent tests to
determine utilization and by-product formation rates.
    (c) Documentation for the facility-specific engineering model used
to apportion fluorinated GHG and N2O consumption. This
documentation must be part of your site GHG Monitoring Plan as required
under Sec.  98.3(g)(5). At a minimum, you must retain the following:
    (1) A clear, detailed description of the facility-specific model,
including how it was developed; the quantifiable metric used in the
model; all sources of information, equations, and formulas, each with
clear definitions of terms and variables; and a clear record of any
changes made to the model while it was used to apportion fluorinated
GHG and N2O consumption across individual recipes (including
those in a set of similar recipes), process sub-types, and/or process
types.
    (2) Sample calculations used for developing a recipe-specific,
process sub-type-specific, or process type-specific gas apportioning
factors (fij) for the two fluorinated GHGs used at your

facility in the largest quantities, on a mass basis, during the
reporting year.
    (d) For each abatement system through which fluorinated GHGs or
N2O flow at your facility, for which you are reporting
controlled emissions, the following:
    (1) Documentation to certify the abatement system is installed,
maintained, and operated in accordance with manufacturers'
specifications.
    (2) Abatement system calibration and maintenance records.
    (3) Where the default destruction or removal efficiency value is
used, documentation from the abatement system supplier describing the
equipment's designed purpose and emission control capabilities for
fluorinated GHG and N2O.
    (4) Where properly measured DRE is used to report emissions, dated
certification by the technician who made the measurement that the
destruction or removal efficiency is calculated in accordance with
methods in EPA 430-R-10-003 (incorporated by reference, see Sec.
98.7), complete documentation of the results of any initial and
subsequent tests, and the final report as specified in EPA 430-R-10-003
(incorporated by reference, see Sec.  98.7).
    (e) Purchase records for gas purchased.
    (f) Invoices for gas purchases and sales.
    (g) Documents and records used to monitor and calculate abatement
system uptime.
    (h) GHG Monitoring Plans, as described in Sec.  98.3(g)(5), must be
completed by April 1, 2011. You must update your GHG Monitoring Plan to
comply with Sec.  98.94(c) consistent with the requirements in Sec.
98.3(g)(5)(iii).

Sec.  98.98  Definitions.

    Except as provided in this section, all of the terms used in this
subpart have the same meaning given in the Clean Air Act and subpart A
of this part. If a conflict exists between a definition provided in
this subpart and a definition provided in subpart A, the definition in
this subpart takes precedence for the reporting requirements in this
subpart.
    Abatement system means a device or equipment that destroys or
removes fluorinated GHGs and N2O in waste streams from one
or more electronics manufacturing production processes.
    Actual gas consumption means the quantity of gas used during wafer/
substrate processing over some period based on a measured change in gas
container weight or gas container pressure or on a measured volume of
gas.
    By-product formation means the creation of fluorinated GHGs during
electronics manufacturing production processes or the creation of
fluorinated GHGs by an abatement system. By-product formation is the
ratio of the mass of the by-product formed to the mass flow of the
input gas, where, for multi-fluorinated-GHG recipes, the denominator
corresponds to the fluorinated GHG with the largest mass flow.
    Chamber cleaning is a process type that consists of the process
sub-types defined in paragraphs (1) through (3) of this definition.
    (1) In situ plasma process sub-type consists of the cleaning of
thin-film production chambers, after processing substrates, with a
fluorinated GHG cleaning reagent that is dissociated into its cleaning
constituents by a plasma generated inside the chamber where the film is
produced.
    (2) Remote plasma process sub-type consists of the cleaning of
thin-film production chambers, after processing substrates, with a
fluorinated GHG cleaning reagent dissociated by a remotely located
plasma source.
    (3) In situ thermal process sub-type consists of the cleaning of
thin-film production chambers, after processing substrates, with a
fluorinated GHG cleaning reagent that is thermally dissociated into its
cleaning constituents inside the chamber where thin films are produced.
    Class means a category of abatement systems grouped by manufacturer
model number(s) and by the gas that the system abates, including
N2O and carbon tetrafluoride (CF4) direct
emissions and by-product formation, and all other fluorinated GHG
direct emissions and by-product formation. Classes may also include any
other abatement systems for which the reporting facility wishes to
report controlled emissions provided that class is identified.
    Controlled emissions means the quantity of emissions that are
released to the atmosphere after application of an emission control
device (e.g., abatement system).
    Destruction or removal efficiency (DRE) means the efficiency of an
abatement system to destroy or remove fluorinated GHGs, N2O,
or both. The destruction or removal efficiency is equal to one minus
the ratio of the mass of all relevant GHGs exiting the abatement system
to the mass of GHG entering the abatement system. When GHGs are formed
in an abatement system, destruction or removal efficiency is expressed
as one minus the ratio of amounts of exiting GHGs to the amounts
entering the system in units of CO2-equivalents
(CO2e).
    Gas utilization means the fraction of input N2O or
fluorinated GHG converted to other substances during the etching,
deposition, and/or wafer and chamber cleaning processes. Gas
utilization is expressed as a rate or factor for specific electronics
manufacturing recipes, process sub-types, or process types.
    Heat transfer fluids are fluorinated GHGs used for temperature
control, device testing, and soldering in certain types of electronic
manufacturing production processes. Heat transfer fluids used in the
electronics sector include perfluoropolyethers, perfluoroalkanes,
perfluoroethers, tertiary perfluoroamines, and perfluorocyclic ethers.
Electronics manufacturers may also use these same fluorinated chemicals
to clean substrate surfaces and other parts.
    Heel means the amount of gas that remains in a gas container after
it is discharged or off-loaded; heel may vary by container type.
    Individual recipe means a specific combination of gases, under
specific conditions of reactor temperature, pressure, flow, radio
frequency (RF) power and duration, used repeatedly to fabricate a
specific feature on a specific film or substrate.
    Maximum designed substrate starts means the maximum quantity of
substrates, expressed as surface area, that could be started each month
during a reporting year if the facility were fully equipped as defined
in the facility design specifications and if the equipment were fully
utilized. It denotes 100 percent of annual manufacturing capacity of a
facility.
    Modeled gas consumed means the quantity of gas used during wafer/
substrate processing over some period based on a verified facility-
specific engineering model used to apportion gas consumption.
    Nameplate capacity means the full and proper charge of chemical
specified by the equipment manufacturer to achieve the equipment's
specified performance. The nameplate capacity is typically indicated on
the equipment's nameplate; it is not necessarily the actual charge,
which may be influenced by leakage and other emissions.
    Operational mode means the time in which an abatement system is
being operated within the range of parameters as specified in the
operations manual provided by the system manufacturer.
    Plasma etching is a process type that consists of any production
process using fluorinated GHG reagents to selectively

remove materials from a substrate during electronics manufacturing. The
materials removed may include SiO2, SiOx-based or
fully organic-based thin-film material, SiN, SiON,
Si3N4, SiC, SiCO, SiCN, etc. (represented by the
general chemical formula,
SiwOxNyXz where w, x, y and
z are zero or integers and X may be some other element such as carbon),
substrate, or metal films (such as aluminum or tungsten).
    Process sub-type is a set of similar manufacturing steps, more
closely related within a broad process type. For example, the chamber
cleaning process type includes in-situ plasma chamber cleaning, remote
plasma chamber cleaning, and in-situ thermal chamber cleaning sub-
types.
    Process types are broad groups of manufacturing steps used at a
facility associated with substrate (e.g., wafer) processing during
device manufacture for which fluorinated GHG emissions and fluorinated
GHG usages are calculated and reported. The process types are Plasma
etching, Chamber cleaning, and Wafer cleaning.
    Properly measured destruction or removal efficiency means
destruction or removal efficiencies measured in accordance with EPA
430-R-10-003 (incorporated by reference, see Sec.  98.7).
    The Random Sampling Abatement System Testing Program (RSASTP) means
the required frequency for measuring the destruction or removal
efficiencies of abatement systems in order to apply properly measured
destruction or removal efficiencies to report controlled emissions.
    Redundant abatement systems means a system that is specifically
designed, installed and operated for the purpose of destroying
fluorinated GHGs and N2O gases. A redundant abatement system
is used as a backup to the main fluorinated GHGs and N2O
abatement system during those times when the main system is not
functioning or operating in accordance with design and operating
specifications.
    Repeatable means that the variables used in the formulas for the
facility's engineering model for gas apportioning factors are based on
observable and measurable quantities that govern gas consumption rather
than engineering judgment about those quantities or gas consumption.
    Similar, with respect to recipes, means those recipes that are
composed of the same set of chemicals and have the same flow
stabilization times and where the documented differences, considered
separately, in reactor pressure, individual gas flow rates, and applied
radio frequency (RF) power are less than or equal to plus or minus 10
percent. For purposes of comparing and documenting recipes that are
similar, facilities may use either the best known method provided by an
equipment manufacturer or the process of record, for which emission
factors for either have been measured.
    Trigger point for change out means the residual weight or pressure
of a gas container type that a facility uses to change out that gas
container.
    Uptime means the ratio of the total time during which the abatement
system is in an operational mode with fluorinated GHGs or
N2O flowing through production process tool(s) connected to
that abatement system, to the total time during which fluorinated GHGs
or N2O are flowing through production process tool(s)
connected to that abatement system.
    Wafer cleaning is a process type that consists of any production
process using fluorinated GHG reagents to clean wafers at any step
during production.
    Wafer passes is a count of the number of times a wafer substrate is
processed in a specific process recipe, sub-type, or type. The total
number of wafer passes over a reporting year is the number of wafer
passes per tool multiplied by the number of operational process tools
in use during the reporting year.
    Wafer starts means the number of fresh wafers that are introduced
into the fabrication sequence each month. It includes test wafers,
which means wafers that are exposed to all of the conditions of process
characterization, including but not limited to actual etch conditions
or actual film deposition conditions.

      Table I-1 to Subpart I of Part 98--Default Emission Factors for Threshold Applicability Determination
----------------------------------------------------------------------------------------------------------------
                                                                Emission factors EFi
           Product type            -----------------------------------------------------------------------------
                                        CF4          C2F6         CHF3         C3F8         NF3          SF6
----------------------------------------------------------------------------------------------------------------
Semiconductors (kg/m\2\)..........         0.90         1.00         0.04         0.05         0.04         0.20
LCD (g/m\2\)......................         0.50           NA           NA           NA         0.90         4.00
MEMS (kg/m\2\)....................           NA           NA           NA           NA           NA         1.02
----------------------------------------------------------------------------------------------------------------
Notes: NA denotes not applicable based on currently available information.

 Table I-2 to Subpart I of Part 98--Examples of Fluorinated GHGs Used by
                        the Electronics Industry
------------------------------------------------------------------------
         Product type           Fluorinated GHGs used during manufacture
------------------------------------------------------------------------
Electronics..................  CF4, C2F6, C3F8, c-C4F8, c-C4F8O, C4F6,
                                C5F8, CHF3, CH2F2, NF3, SF6, and HTFs
                                (CF3-(O-CF(CF3)-CF2)n-(O-CF2)m-O-CF3,
                                CnF2n+2, CnF2n+1(O)CmF2m+1, CnF2nO,
                                (CnF2n+1)3N).
------------------------------------------------------------------------

      Table I-3 to Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for
                                              Semiconductor Manufacturing for 150mm and 200 mm Wafer Sizes
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                                Process gas i
                Process type/Sub-type                 --------------------------------------------------------------------------------------------------
                                                         CF4      C2F6     CHF3    CH2F2     C3F8    c-C4F8    NF3      SF6      C4F6     C5F8    C4F8O
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                     Plasma Etching
--------------------------------------------------------------------------------------------------------------------------------------------------------
1-Ui.................................................     0.69     0.56     0.38    0.093       NA     0.25    0.038     0.20     0.14       NA       NA
BCF4.................................................       NA     0.23    0.026    0.021       NA     0.19   0.0040       NA     0.13       NA       NA
BC2F6................................................       NA       NA       NA       NA       NA    0.084       NA       NA     0.12       NA       NA
BC3F8................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
--------------------------------------------------------------------------------------------------------------------------------------------------------

                                                                    Chamber Cleaning
--------------------------------------------------------------------------------------------------------------------------------------------------------
In situ plasma cleaning:
    1-Ui.............................................     0.92     0.55       NA       NA     0.40     0.10     0.18       NA       NA       NA     0.14
    BCF4.............................................       NA     0.19       NA       NA     0.20     0.11    0.011       NA       NA       NA     0.13
    BC2F6............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA    0.030
    BC3F8............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
Remote plasma cleaning:
    1-Ui.............................................       NA       NA       NA       NA       NA       NA    0.018       NA       NA       NA       NA
    BCF4.............................................       NA       NA       NA       NA       NA       NA   0.0047       NA       NA       NA       NA
    BC2F6............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BC3F8............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
In situ thermal cleaning:
    1-Ui.............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BCF4.............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BC2F6............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BC3F8............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                     Wafer Cleaning
--------------------------------------------------------------------------------------------------------------------------------------------------------
1-Ui.................................................     0.77       NA       NA     0.24       NA       NA     0.23     0.20       NA       NA       NA
BCF4.................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
BC2F6................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
BC3F8................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
--------------------------------------------------------------------------------------------------------------------------------------------------------
Notes: NA denotes not applicable based on currently available information.

      Table I-4 to Subpart I of Part 98-Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for
                                                    Semiconductor Manufacturing for 300 mm Wafer Size
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                                Process gas i
                Process type/sub-type                 --------------------------------------------------------------------------------------------------
                                                         CF4      C2F6     CHF3    CH2F2     C3F8    c-C4F8    NF3      SF6      C4F6     C5F8    C4F8O
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                     Plasma Etching
--------------------------------------------------------------------------------------------------------------------------------------------------------
1-Ui.................................................     0.80     0.80     0.48     0.14       NA     0.29     0.32     0.37     0.09       NA       NA
BCF4.................................................       NA       NA   0.0018   0.0011       NA    0.079       NA       NA     0.27       NA       NA
BC2F6................................................       NA       NA   0.0011       NA       NA     0.12       NA       NA     0.29       NA       NA
BC3F8................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                    Chamber Cleaning
--------------------------------------------------------------------------------------------------------------------------------------------------------
In situ plasma cleaning:
    1-Ui.............................................       NA       NA       NA       NA       NA       NA     0.23       NA       NA       NA       NA
    BCF4.............................................       NA       NA       NA       NA       NA       NA   0.0046       NA       NA       NA       NA
    BC2F6............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BC3F8............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
Remote Plasma Cleaning:
    1-Ui.............................................       NA       NA       NA       NA    0.063       NA    0.018       NA       NA       NA       NA
    BCF4.............................................       NA       NA       NA       NA       NA       NA    0.040       NA       NA       NA       NA
    BC2F6............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BC3F8............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
In Situ Thermal Cleaning:
    1-Ui.............................................       NA       NA       NA       NA       NA       NA     0.28       NA       NA       NA       NA
    BCF4.............................................       NA       NA       NA       NA       NA       NA    0.010       NA       NA       NA       NA
    BC2F6............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
    BC3F8............................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                     Wafer Cleaning
--------------------------------------------------------------------------------------------------------------------------------------------------------
1-Ui.................................................     0.77       NA       NA     0.24       NA       NA     0.23     0.20       NA       NA       NA
BCF4.................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
BC2F6................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
BC3F8................................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA
--------------------------------------------------------------------------------------------------------------------------------------------------------
Notes: NA denotes not applicable based on currently available information.

   Table I-5 to Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for MEMS
                                                                      Manufacturing
--------------------------------------------------------------------------------------------------------------------------------------------------------
                                                                                Process gas i
                                             -----------------------------------------------------------------------------------------------------------
            Process type factors                                                                      NF3
                                                CF4      C2F6     CHF3    CH2F2     C3F8    c-C4F8   Remote    NF3      SF6     C4F6a    C5F8a    C4F8Oa
--------------------------------------------------------------------------------------------------------------------------------------------------------
Etch 1-Ui...................................      0.7  \1\ 0.4  \1\ 0.4      \1\       NA  \1\ 0.2       NA      0.2      0.2      0.1      0.2       NA
                                                                            0.06
Etch BCF4...................................       NA  \1\ 0.4      \1\      \1\       NA      0.2       NA       NA       NA  \1\ 0.3      0.2       NA
                                                                   0.07     0.08
Etch BC2F6..................................       NA       NA       NA       NA       NA      0.2       NA       NA       NA  \1\ 0.2      0.2       NA
CVD 1-Ui....................................      0.9      0.6       NA       NA      0.4      0.1     0.02      0.2       NA       NA      0.1      0.1
CVD BCF4....................................       NA      0.1       NA       NA      0.1      0.1      \2\  \2\ 0.1       NA       NA      0.1      0.1
                                                                                0.02
CVD BC3F8...................................       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA       NA      0.4
--------------------------------------------------------------------------------------------------------------------------------------------------------
Notes: NA denotes not applicable based on currently available information.
\1\ Estimate includes multi-gas etch processes.
\2\ Estimate reflects presence of low-k, carbide and multi-gas etch processes that may contain a C-containing fluorinated GHG additive.

   Table I-6 to Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-
                              Product Formation Rates (Bijk) for LCD Manufacturing
----------------------------------------------------------------------------------------------------------------
                                                                  Process Gas i
                                --------------------------------------------------------------------------------
      Process type factors                                                               NF3
                                   CF4      C2F6     CHF3    CH2F2     C3F8    c-C4F8   Remote    NF3      SF6
----------------------------------------------------------------------------------------------------------------
Etch 1-Ui......................      0.6       NA      0.2       NA       NA      0.1       NA       NA      0.3
Etch BCF4......................       NA       NA     0.07       NA       NA    0.009       NA       NA       NA
Etch BCHF3.....................       NA       NA       NA       NA       NA     0.02       NA       NA       NA
Etch BC2F6.....................       NA       NA     0.05       NA       NA       NA       NA       NA       NA
CVD 1-Ui.......................       NA       NA       NA       NA       NA       NA     0.03      0.3      0.9
----------------------------------------------------------------------------------------------------------------
Notes: NA denotes not applicable based on currently available information.

   Table I-7 to Subpart I of Part 98--Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-
                               Product Formation Rates (Bijk) for PV Manufacturing
----------------------------------------------------------------------------------------------------------------
                                                                  Process Gas i
                               ---------------------------------------------------------------------------------
     Process type factors                                                                NF3
                                  CF4      C2F6     CHF3    CH2F2     C3F8    c-C4F8   Remote     NF3      SF6
----------------------------------------------------------------------------------------------------------------
Etch 1-Ui.....................      0.7      0.4      0.4       NA       NA      0.2        NA       NA      0.4
Etch BCF4.....................       NA      0.2       NA       NA       NA      0.1        NA       NA       NA
Etch BC2F6....................       NA       NA       NA       NA       NA      0.1        NA       NA       NA
CVD 1-Ui......................       NA      0.6       NA       NA      0.1      0.1        NA      0.3      0.4
CVD BCF4......................       NA      0.2       NA       NA      0.2      0.1        NA       NA       NA
----------------------------------------------------------------------------------------------------------------
Notes: NA denotes not applicable based on currently available information.

 Table I-8 to Subpart I of Part 98--Default Emission Factors (1-UN2O j)
                      for N2O Utilization (UN2O j)
------------------------------------------------------------------------
                       Process type factors                         N2O
------------------------------------------------------------------------
CVD 1-Ui.........................................................    0.8
Other Manufacturing Process 1-Ui.................................    1.0
------------------------------------------------------------------------

0
9. Add subpart L to read as follows:

Subpart L--Fluorinated Gas Production

Sec.
98.120 Definition of the source category.
98.121 Reporting threshold.
98.122 GHGs to report.
98.123 Calculating GHG emissions.
98.124 Monitoring and QA/QC requirements.
98.125 Procedures for estimating missing data.
98.126 Data reporting requirements.
98.127 Records that must be retained.
98.128 Definitions.

Subpart L--Fluorinated Gas Production

Sec.  98.120  Definition of the source category.

    (a) The fluorinated gas production source category consists of
processes that produce a fluorinated gas from any raw material or
feedstock chemical, except for processes that generate HFC-23 during
the production of HCFC-22.
    (b) To produce a fluorinated gas means to manufacture a fluorinated
gas from any raw material or feedstock chemical. Producing a
fluorinated gas includes producing a fluorinated GHG as defined at
Sec.  98.410(b). Producing a fluorinated gas also includes the
manufacture of a chlorofluorocarbon (CFC) or hydrochlorofluorocarbon
(HCFC) from any raw material or feedstock chemical, including
manufacture of a CFC or HCFC as an isolated intermediate for use in a
process that will result in the transformation of the CFC or HCFC
either at or outside of the production facility. Producing a
fluorinated gas does not include the reuse or recycling of a
fluorinated gas, the creation of HFC-23 during the production of HCFC-
22, the creation of intermediates that are created and transformed in a
single process with no storage of the intermediates, or the creation of
fluorinated GHGs that are released or destroyed at the production
facility

before the production measurement in Sec.  98.414(a).

Sec.  98.121  Reporting threshold.

    You must report GHG emissions under this subpart if your facility
contains a fluorinated gas production process that generates or emits
fluorinated GHG and the facility meets the requirements of either Sec.
98.2(a)(1) or (a)(2). To calculate GHG emissions for comparison to the
25,000 metric ton CO2e per year emission threshold in Sec.
98.2(a)(2), calculate process emissions from fluorinated gas production
using uncontrolled GHG emissions.

Sec.  98.122  GHGs to report.

    (a) You must report CO2, CH4, and
N2O combustion emissions from each stationary combustion
unit. You must calculate and report these emissions under subpart C of
this part (General Stationary Fuel Combustion Sources) by following the
requirements of subpart C.
    (b) You must report under subpart O of this part (HCFC-22
Production and HFC-23 Destruction) the emissions of HFC-23 from HCFC-22
production processes and HFC-23 destruction processes. Do not report
the generation and emissions of HFC-23 from HCFC-22 production under
this subpart.
    (c) You must report the total mass of each fluorinated GHG emitted
from:
    (1) Each fluorinated gas production process and all fluorinated gas
production processes combined.
    (2) Each fluorinated gas transformation process that is not part of
a fluorinated gas production process and all such fluorinated gas
transformation processes combined, except report separately fluorinated
GHG emissions from transformation processes where a fluorinated GHG
reactant is produced at another facility.
    (3) Each fluorinated gas destruction process that is not part of a
fluorinated gas production process or a fluorinated gas transformation
process and all such fluorinated gas destruction processes combined.
    (4) Venting of residual fluorinated GHGs from containers returned
from the field.

Sec.  98.123  Calculating GHG emissions.

    For fluorinated gas production and transformation processes, you
must calculate the fluorinated GHG emissions from each process using
either the mass balance method specified in paragraph (b) of this
section or the emission factor or emission calculation factor method
specified in paragraphs (c), (d), and (e) of this section, as
appropriate. For destruction processes that destroy fluorinated GHGs
that were previously ``produced'' as defined at Sec.  98.410(b), you
must calculate emissions using the procedures in paragraph (f) of this
section. For venting of residual gas from containers (e.g., cylinder
heels), you must calculate emissions using the procedures in paragraph
(g) of this section.
    (a) Default GWP value. In paragraphs (b)(1) and (c)(1) of this
section and in Sec.  98.124(b)(8) and (c)(2), use a GWP of 2,000 for
fluorinated GHGs that do not have GWPs listed in Table A-1 to subpart A
of this part, except as provided in paragraph Sec.  98.123(c)(1)(vi).
Do not report CO2e emissions under Sec.  98.3(c)(4) for
fluorinated GHGs that do not have GWPs listed in Table A-1 to subpart A
of this part.
    (b) Mass balance method. Before using the mass balance approach to
estimate your fluorinated GHG emissions from a process, you must ensure
that the process and the equipment and methods used to measure it meet
either the error limits described in this paragraph and calculated
under paragraph (b)(1) of this section or the requirements specified in
paragraph Sec.  98.124(b)(8). If you choose to calculate the error
limits, you must estimate the absolute and relative errors associated
with using the mass balance approach on that process using Equations L-
1 through L-4 of this section in conjunction with Equations L-5 through
L-10 of this section. You may use the mass-balance approach to estimate
emissions from the process if this calculation results in an absolute
error of less than or equal to 3,000 metric tons CO2e per
year or a relative error of less than or equal to 30 percent of the
estimated CO2e fluorinated GHG emissions. If you do not meet
either of the error limits or the requirements of paragraph Sec.
98.124(b)(8), you must use the emission factor approach detailed in
paragraphs (c), (d), and (e) of this section to estimate emissions from
the process.
    (1) Error calculation. To perform the calculation, you must first
calculate the absolute and relative errors associated with the
quantities calculated using either Equations L-7 through L-10 of this
section or Equation L-17 of this section. Alternatively, you may
estimate these errors based on the variability of previous process
measurements (e.g., the variability of measurements of stream
concentrations), provided these measurements are representative of the
current process and current measurement devices and techniques. Once
errors have been calculated for the quantities in these equations,
those errors must be used to calculate the errors in Equations L-6 and
L-5 of this section. You may ignore the errors associated with
Equations L-11, L-12, and L-13 of this section.
    (i) Where the measured quantity is a mass, the error in the mass
must be equated to the accuracy or precision (whichever is larger) of
the flowmeter, scale, or combination of volumetric and density
measurements at the flow rate or mass measured.
    (ii) Where the measured quantity is a concentration of a stream
component, the error of the concentration must be equated to the
accuracy or precision (whichever is larger) with which you estimate the
mean concentration of that stream component, accounting for the
variability of the process, the frequency of the measurements, and the
accuracy or precision (whichever is larger) of the analytical technique
used to measure the concentration at the concentration measured. If the
variability of process measurements is used to estimate the error, this
variability shall be assumed to account both for the variability of the
process and the precision of the analytical technique. Use standard
statistical techniques such as the student's t distribution to estimate
the error of the mean of the concentration measurements as a function
of process variability and frequency of measurement.
    (iii) Equation L-1 of this section provides the general formula for
calculating the absolute errors of sums and differences where the sum,
S, is the summation of variables measured, a, b, c, etc. (e.g., S = a +
b + c):
[GRAPHIC] [TIFF OMITTED] TR01DE10.019

Where:

eSA = Absolute error of the sum, expressed as one half of
a 95 percent confidence interval.
ea = Relative error of a, expressed as one half of a 95
percent confidence interval.
eb = Relative error of b, expressed as one half of a 95
percent confidence interval.
ec = Relative error of c, expressed as one half of a 95
percent confidence interval.

    (iv) Equation L-2 of this section provides the general formula for
calculating the relative errors of sums and differences:
[GRAPHIC] [TIFF OMITTED] TR01DE10.020

Where:

eSR = Relative error of the sum, expressed as one half of
a 95 percent confidence interval.
eSA = Absolute error of the sum, expressed as one half of
a 95 percent confidence interval.
a+b+c = Sum of the variables measured.

    (v) Equation L-3 of this section provides the general formula for
calculating the absolute errors of products (e.g., flow rates of GHGs
calculated as the product of the flow rate of the stream and the
concentration of the GHG in the stream), where the product, P, is the
result of multiplying the variables measured, a, b, c, etc. (e.g., P =
a*b*c):
[GRAPHIC] [TIFF OMITTED] TR01DE10.021

Where:

ePA = Absolute error of the product, expressed as one
half of a 95 percent confidence interval.
ea = Relative error of a, expressed as one half of a 95
percent confidence interval.
eb = Relative error of b, expressed as one half of a 95
percent confidence interval.
ec = Relative error of c, expressed as one half of a 95
percent confidence interval.

    (vi) Equation L-4 of this section provides the general formula for
calculating the relative errors of products:
[GRAPHIC] [TIFF OMITTED] TR01DE10.022

Where:

ePR = Relative error of the product, expressed as one
half of a 95 percent confidence interval.
ePA = Absolute error of the product, expressed as one
half of a 95 percent confidence interval.
a*b*c = Product of the variables measured.

    (vii) Calculate the absolute error of the emissions estimate in
terms of CO2e by performing a preliminary estimate of the
annual CO2e emissions of the process using the method in
paragraph (b)(1)(viii) of this section. Multiply this result by the
relative error calculated for the mass of fluorine emitted from the
process in Equation L-6 of this section.
    (viii) To estimate the annual CO2e emissions of the
process for use in the error estimate, apply the methods set forth in
paragraphs (b)(2) through (b)(7) and (b)(9) through (b)(16) of this
section to representative process measurements. If these process
measurements represent less than one year of typical process activity,
adjust the estimated emissions to account for one year of typical
process activity. To estimate the terms FERd, FEP, and
FEBk for use in the error estimate for Equations L-11, L-12,
and L-13 of this section, you must either use emission testing,
monitoring of emitted streams, and/or engineering calculations or
assessments, or in the alternative assume that all fluorine is emitted
in the form of the fluorinated GHG that has the highest GWP among the
fluorinated GHGs that occur in more than trace concentrations in the
process. To convert the fluorinated GHG emissions to CO2e,
use Equation A-1 of Sec.  98.2. For fluorinated GHGs whose GWPs are not
listed in Table A-1 to subpart A of this part, use a default GWP of
2,000.
    (2) The total mass of each fluorinated GHG emitted annually from
each fluorinated gas production and each fluorinated GHG transformation
process must be estimated by using Equation L-5 of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.023

Where:

EFGHGf = Total mass of each fluorinated GHG f emitted
annually from production or transformation process i (metric tons).
ERp-FGHGf = Total mass of fluorinated GHG reactant f
emitted from production process i over the period p (metric tons,
calculated in Equation L-11 of this section).
EPp-FGHGf = Total mass of the fluorinated GHG product f
emitted from production process i over the period p (metric tons,
calculated in Equation L-12 of this section).
EBp-FGHGf = Total mass of fluorinated GHG by-product f
emitted from production process i over the period p (metric tons,
calculated in Equation L-13 of this section).
n = Number of concentration and flow measurement periods for the
year.

    (3) The total mass of fluorine emitted from process i over the
period p must be estimated at least monthly by calculating the
difference between the total mass of fluorine in the reactant(s) (or
inputs, for processes that do not involve a chemical reaction) and the
total mass of fluorine in the product (or outputs, for processes that
do not involve a chemical reaction), accounting for the total mass of
fluorine in any destroyed or recaptured streams that contain reactants,
products, or by-products (or inputs or outputs). This calculation must
be performed using Equation L-6 of this section. An element other than
fluorine may be used in the mass-balance equation, provided the element
occurs in all of the fluorinated GHGs fed into or generated by the
process. In this case, the mass fractions of the element in the
reactants, products, and by-products must be calculated as appropriate
for that element.
[GRAPHIC] [TIFF OMITTED] TR01DE10.024

Where:

EF = Total mass of fluorine emitted from process i over
the period p (metric tons).
Rd = Total mass of the fluorine-containing reactant d
that is fed into process i over the period p (metric tons).
P = Total mass of the fluorine-containing product produced by
process i over the period p (metric tons).

MFFRd = Mass fraction of fluorine in reactant d,
calculated in Equation L-14 of this section.
MFFP = Mass fraction of fluorine in the product,
calculated in Equation L-15 of this section.
FD = Total mass of fluorine in destroyed or recaptured
streams from process i containing fluorine-containing reactants,
products, and by-products over the period p, calculated in Equation
L-7 of this section.
v = Number of fluorine-containing reactants fed into process i.

    (4) The mass of total fluorine in destroyed or recaptured streams
containing fluorine-containing reactants, products, and by-products
must be estimated at least monthly using Equation L-7 of this section
unless you use the alternative approach provided in paragraph (b)(15)
of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.025

Where:

FD = Total mass of fluorine in destroyed or recaptured
streams from process i containing fluorine-containing reactants,
products, and by-products over the period p.
Pj = Mass of the fluorine-containing product removed from
process i in stream j and destroyed over the period p (calculated in
Equation L-8 or L-9 of this section).
Bkj = Mass of fluorine-containing by-product k removed
from process i in stream j and destroyed over the period p
(calculated in Equation L-8 or L-9 of this section).
Bkl = Mass of fluorine-containing by-product k removed
from process i in stream l and recaptured over the period p.
Rdj = Mass of fluorine-containing reactant d removed from
process i in stream j and destroyed over the period p (calculated in
Equation L-8 or L-9 of this section).
MFFRd = Mass fraction of fluorine in reactant d,
calculated in Equation L-14 of this section.
MFFP = Mass fraction of fluorine in the product,
calculated in Equation L-15 of this section.
MFFBk = Mass fraction of fluorine in by-product k,
calculated in Equation L-16 of this section.
q = Number of streams destroyed in process i.
x = Number of streams recaptured in process i.
u = Number of fluorine-containing by-products generated in process
i.
v = Number of fluorine-containing reactants fed into process i.

    (5) The mass of each fluorinated GHG removed from process i in
stream j and destroyed over the period p (i.e., Pj,
Bkj, or Rdj, as applicable) must be estimated by
applying the destruction efficiency of the device that has been
demonstrated for the fluorinated GHG f to fluorinated GHG f using
Equation L-8 of this section:
[GRAPHIC] [TIFF OMITTED] TR01DE10.026

Where:

MFGHGfj = Mass of fluorinated GHG f removed from process
i in stream j and destroyed over the period p. (This may be
Pj, Bkj, or Rdj, as applicable.)
DEFGHGf = Destruction efficiency of the device that has
been demonstrated for fluorinated GHG f in stream j (fraction).
CFGHGfj = Concentration (mass fraction) of fluorinated
GHG f in stream j removed from process i and fed into the
destruction device over the period p. If this concentration is only
a trace concentration, cF-GHGfj is equal to zero.
Sj = Mass removed in stream j from process i and fed into
the destruction device over the period p (metric tons).

    (6) The mass of each fluorine-containing compound that is not a
fluorinated GHG and that is removed from process i in stream j and
destroyed over the period p (i.e., Pj, Bkj, or
Rdj, as applicable) must be estimated using Equation L-9 of
this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.027

Where:

MFCgj = Mass of non-GHG fluorine-containing compound g
removed from process i in stream j and destroyed over the period p.
(This may be Pj, Bkj, or Rdj, as
applicable).
cFCgj = Concentration (mass fraction) of non-GHG
fluorine-containing compound g in stream j removed from process i
and fed into the destruction device over the period p. If this
concentration is only a trace concentration, cFCgj is
equal to zero.
Sj = Mass removed in stream j from process i and fed into
the destruction device over the period p (metric tons).

    (7) The mass of fluorine-containing by-product k removed from
process i in stream l and recaptured over the period p must be
estimated using Equation L-10 of this section:
[GRAPHIC] [TIFF OMITTED] TR01DE10.028

Where:

Bkl = Mass of fluorine-containing by-product k removed
from process i in stream l and recaptured over the period p (metric
tons).
cBkl = Concentration (mass fraction) of fluorine-
containing by-product k in stream l removed from process i and
recaptured over the period p. If this concentration is only a trace
concentration, cBkl is equal to zero.
Sl = Mass removed in stream l from process i and
recaptured over the period p (metric tons).

    (8) To estimate the terms FERd, FEP, and FEBk
for Equations L-11, L-12, and L-13 of this section, you must assume
that the total mass of fluorine emitted, EF, estimated in
Equation L-6 of this section, occurs in the form of the fluorinated GHG
that has the highest GWP among the fluorinated GHGs that occur in more
than trace concentrations in the process unless you possess emission
characterization measurements showing otherwise. These emission
characterization measurements must meet the requirements in paragraph
(8)(i), (ii), or (iii) of this section, as appropriate. The sum of the
terms must equal 1. You must document the data and calculations that
are used to speciate individual compounds and to estimate
FERd, FEP, and FEBk. Exclude from your
calculations the fluorine included in FD. For example,
exclude fluorine-containing compounds that are not fluorinated GHGs and
that result from the destruction of fluorinated GHGs by any destruction
devices (e.g., the mass of HF created by combustion of an HFC).
However, include emissions of fluorinated GHGs that survive the
destruction process.
    (i) If the calculations under paragraph (b)(1)(viii) of this
section, or any subsequent measurements and calculations under this
subpart, indicate that the process emits 25,000 metric tons
CO2e or more, estimate the emissions from each process vent,
considering controls, using the methods in Sec.  98.123(c)(1). You must
characterize the emissions of any process vent that emits 25,000 metric
tons CO2e or more as specified in Sec.  98.124(b)(4).

    (ii) For other vents, including vents from processes that emit less
than 25,000 metric tons CO2e, you must characterize
emissions as specified in Sec.  98.124(b)(5).
    (iii) For fluorine emissions that are not accounted for by vent
estimates, you must characterize emissions as specified in Sec.
98.124(b)(6).
    (9) The total mass of fluorine-containing reactant d emitted must
be estimated at least monthly based on the total fluorine emitted and
the fraction that consists of fluorine-containing reactants using
Equation L-11 of this section. If the fluorine-containing reactant d is
a non-GHG, you may assume that FERd is zero.
[GRAPHIC] [TIFF OMITTED] TR01DE10.029

Where:

ER-ip = Total mass of fluorine-containing reactant d that
is emitted from process i over the period p (metric tons).
FERd = The fraction of the mass emitted that consists of
the fluorine-containing reactant d.
EF = Total mass of fluorine emissions from process i over
the period p (metric tons), calculated in Equation L-6 of this
section.
FEP = The fraction of the mass emitted that consists of the
fluorine-containing product.
FEBk = The fraction of the mass emitted that consists of
fluorine-containing by-product k.
MFFRd = Mass fraction of fluorine in reactant d,
calculated in Equation L-14 of this section.
MFFP = Mass fraction of fluorine in the product,
calculated in Equation L-15 of this section.
MFFBk = Mass fraction of fluorine in by-product k,
calculation in Equation L-16 of this section.
u = Number of fluorine-containing by-products generated in process
i.
v = Number of fluorine-containing reactants fed into process i.

    (10) The total mass of fluorine-containing product emitted must be
estimated at least monthly based on the total fluorine emitted and the
fraction that consists of fluorine-containing products using Equation
L-12 of this section. If the fluorine-containing product is a non-GHG,
you may assume that FEP is zero.
[GRAPHIC] [TIFF OMITTED] TR01DE10.030

Where:

EP-ip = Total mass of fluorine-containing product emitted
from process i over the period p (metric tons).
FEP = The fraction of the mass emitted that consists of the
fluorine-containing product.
EF = Total mass of fluorine emissions from process i over
the period p (metric tons), calculated in Equation L-6 of this
section.
FERd = The fraction of the mass emitted that consists of
fluorine-containing reactant d.
FEBk = The fraction of the mass emitted that consists of
fluorine-containing by-product k.
MFFRd = Mass fraction of fluorine in reactant d,
calculated in Equation L-14 of this section.
MFFP = Mass fraction of fluorine in the product,
calculated in Equation L-15 of this section.
MFFBk = Mass fraction of fluorine in by-product k,
calculation in Equation L-16 of this section.
u = Number of fluorine-containing by-products generated in process
i.
v = Number of fluorine-containing reactants fed into process i.

    (11) The total mass of fluorine-containing by-product k emitted
must be estimated at least monthly based on the total fluorine emitted
and the fraction that consists of fluorine-containing by-products using
Equation L-13 of this section. If fluorine-containing by-product k is a
non-GHG, you may assume that FEBk is zero.
[GRAPHIC] [TIFF OMITTED] TR01DE10.031

Where:

EBk-ip = Total mass of fluorine-containing by-product k
emitted from process i over the period p (metric tons).
FEBk = The fraction of the mass emitted that consists of
fluorine-containing by-product k.
FERd = The fraction of the mass emitted that consists of
fluorine-containing reactant d.
FEP = The fraction of the mass emitted that consists of the
fluorine-containing product.
EF = Total mass of fluorine emissions from process i over
the period p (metric tons), calculated in Equation L-6 of this
section.
MFFRd = Mass fraction of fluorine in reactant d,
calculated in Equation L-14 of this section.
MFFP = Mass fraction of fluorine in the product,
calculated in Equation L-15 of this section.
MFFBk = Mass fraction of fluorine in by-product k,
calculation in Equation L-16 of this section.
u = Number of fluorine-containing by-products generated in process
i.
v = Number of fluorine-containing reactants fed into process i.

    (12) The mass fraction of fluorine in reactant d must be estimated
using Equation L-14 of this section:

[GRAPHIC] [TIFF OMITTED] TR01DE10.032

Where:

MFFRd = Mass fraction of fluorine in reactant d
(fraction).
MFRd = Moles fluorine per mole of reactant d.
AWF = Atomic weight of fluorine.
MWRd = Molecular weight of reactant d.

    (13) The mass fraction of fluorine in the product must be estimated
using Equation L-15 of this section:
[GRAPHIC] [TIFF OMITTED] TR01DE10.033

Where:

MFFP = Mass fraction of fluorine in the product
(fraction).
MFP = Moles fluorine per mole of product.
AWF = Atomic weight of fluorine.
MWP = Molecular weight of the product produced.

    (14) The mass fraction of fluorine in by-product k must be
estimated using Equation L-16 of this section:
[GRAPHIC] [TIFF OMITTED] TR01DE10.034

Where:

MFFBk = Mass fraction of fluorine in the product
(fraction).
MFBk = Moles fluorine per mole of by-product k.
AWF = Atomic weight of fluorine.
MWBk = Molecular weight of by-product k.
    (15) Alternative for determining the mass of fluorine destroyed or
recaptured. As an alternative to using Equation L-7 of this section as
provided in paragraph (b)(4) of this section, you may estimate at least
monthly the total mass of fluorine in destroyed or recaptured streams
containing fluorine-containing compounds (including all fluorine-
containing reactants, products, and byproducts) using Equation L-17 of
this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.035

Where:

FD = Total mass of fluorine in destroyed or recaptured
streams from process i containing fluorine-containing reactants,
products, and by-products over the period p.
DEavgj = Weighted average destruction efficiency of the
destruction device for the fluorine-containing compounds identified
in destroyed stream j under Sec.  98.124(b)(4)(ii) and (5)(ii)
(calculated in Equation L-18 of this section)(fraction).
cTFj = Concentration (mass fraction) of total fluorine in
stream j removed from process i and fed into the destruction device
over the period p. If this concentration is only a trace
concentration, cTFj is equal to zero.
Sj = Mass removed in stream j from process i and fed into
the destruction device over the period p (metric tons).
cTFl = Concentration (mass fraction) of total fluorine in
stream l removed from process i and recaptured over the period p. If
this concentration is only a trace concentration, cBkl is
equal to zero.
Sl = Mass removed in stream l from process i and
recaptured over the period p.
q = Number of streams destroyed in process i.
x = Number of streams recaptured in process i.

    (16) Weighted average destruction efficiency. For purposes of
Equation L-17 of this section, calculate the weighted average
destruction efficiency applicable to a destroyed stream using Equation
L-18 of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.036

Where:

DEavgj = Weighted average destruction efficiency of the
destruction device for the fluorine-containing compounds identified
in destroyed stream j under 98.124(b)(4)(ii) or (b)(5)(ii), as
appropriate.
DEFGHGf = Destruction efficiency of the device that has
been demonstrated for fluorinated GHG f in stream j (fraction).
cFGHGfj = Concentration (mass fraction) of fluorinated
GHG f in stream j removed from process i and fed into the
destruction device over the period p. If this concentration is only
a trace concentration, cF-GHGfj is equal to zero.
cFCgj = Concentration (mass fraction) of non-GHG
fluorine-containing compound g in stream j removed from process i
and fed into the destruction device over the period p. If this
concentration is only a trace concentration, cFCgj is
equal to zero.
Sj = Mass removed in stream j from process i and fed into
the destruction device over the period p (metric tons).

MFFFGHGf = Mass fraction of fluorine in fluorinated GHG
f, calculated in Equation L-14, L-15, or L-16 of this section, as
appropriate.
MFFFCg = Mass fraction of fluorine in non-GHG fluorine-
containing compound g, calculated in Equation L-14, L-15, or L-16 of
this section, as appropriate.
w = Number of fluorinated GHGs in destroyed stream j.
y = Number of non-GHG fluorine-containing compounds in destroyed
stream j.

    (c) Emission factor and emission calculation factor methods. To use
the method in this paragraph for batch processes, you must comply with
either paragraph (c)(3) of this section (Emission Factor approach) or
paragraph (c)(4) of this section (Emission Calculation Factor
approach). To use the method in this paragraph for continuous
processes, you must first make a preliminary estimate of the emissions
from each individual continuous process vent under paragraph (c)(1) of
this section. If your continuous process operates under different
conditions as part of normal operations, you must also define the
different operating scenarios and make a preliminary estimate of the
emissions from the vent for each operating scenario. Then, compare the
preliminary estimate for each continuous process vent (summed across
operating scenarios) to the criteria in paragraph (c)(2) of this
section to determine whether the process vent meets the criteria for
using the emission factor method described in paragraph (c)(3) of this
section or whether the process vent meets the criteria for using the
emission calculation factor method described in paragraph (c)(4) of
this section. For continuous process vents that meet the criteria for
using the emission factor method described in paragraph (c)(3) of this
section and that have more than one operating scenario, compare the
preliminary estimate for each operating scenario to the criteria in
(c)(3)(ii) to determine whether an emission factor must be developed
for that operating scenario.
    (1) Preliminary estimate of emissions by process vent. You must
estimate the annual CO2e emissions of fluorinated GHGs for
each process vent within each operating scenario of a continuous
process using the approaches specified in paragraph (c)(1)(i) or
(c)(1)(ii) of this section, accounting for any destruction as specified
in paragraph (c)(1)(iii) of this section. You must determine emissions
of fluorinated GHGs by process vent by using measurements, by using
calculations based on chemical engineering principles and chemical
property data, or by conducting an engineering assessment. You may use
previous measurements, calculations, and assessments if they represent
current process operating conditions or process operating conditions
that would result in higher fluorinated GHG emissions than the current
operating conditions and if they were performed in accordance with
paragraphs (c)(1)(i), (c)(1)(ii), and (c)(1)(iii) of this section, as
applicable. You must document all data, assumptions, and procedures
used in the calculations or engineering assessment and keep a record of
the emissions determination as required by Sec.  98.127(a).
    (i) Engineering calculations. For process vent emission
calculations, you may use any of paragraphs (c)(1)(i)(A), (c)(1)(i)(B),
or (c)(1)(i)(C) of this section.
    (A) U.S. Environmental Protection Agency, Emission Inventory
Improvement Program, Volume II: Chapter 16, Methods for Estimating Air
Emissions from Chemical Manufacturing Facilities, August 2007, Final
(incorporated by reference, see Sec.  98.7).
    (B) You may determine the fluorinated GHG emissions from any
process vent within the process using the procedures specified in Sec.
63.1257(d)(2)(i) and (d)(3)(i)(B) of this chapter, except as specified
in paragraphs (c)(1)(i)(B)(1) through (c)(1)(i)(B)(4) of this section.
For the purposes of this subpart, use of the term ``HAP'' in Sec.
63.1257(d)(2)(i) and (d)(3)(i)(B) of this chapter means ``fluorinated
GHG''.
    (1) To calculate emissions caused by the heating of a vessel
without a process condenser to a temperature lower than the boiling
point, you must use the procedures in Sec.  63.1257(d)(2)(i)(C)(3) of
this chapter.
    (2) To calculate emissions from depressurization of a vessel
without a process condenser, you must use the procedures in Sec.
63.1257(d)(2)(i)(D)(10) of this chapter.
    (3) To calculate emissions from vacuum systems, the terms used in
Equation 33 to Sec.  63.1257(d)(2)(i)(E) of this chapter are defined as
follows:
    (i) Psystem = Absolute pressure of the receiving vessel.
    (ii) Pi= Partial pressure of the fluorinated GHG
determined at the exit temperature and exit pressure conditions of the
condenser or at the conditions of the dedicated receiver.
    (iii) Pj= Partial pressure of condensables (including
fluorinated GHG) determined at the exit temperature and exit pressure
conditions of the condenser or at the conditions of the dedicated
receiver.
    (iv) MWFluorinated GHG= Molecular weight of the
fluorinated GHG determined at the exit temperature and exit pressure
conditions of the condenser or at the conditions of the dedicated
receiver.
    (4) To calculate emissions when a vessel is equipped with a process
condenser or a control condenser, you must use the procedures in Sec.
63.1257(d)(3)(i)(B) of this chapter, except as follows:
    (i) You must determine the flowrate of gas (or volume of gas),
partial pressures of condensables, temperature (T), and fluorinated GHG
molecular weight (MWFluorinated GHG) at the exit temperature
and exit pressure conditions of the condenser or at the conditions of
the dedicated receiver.
    (ii) You must assume that all of the components contained in the
condenser exit vent stream are in equilibrium with the same components
in the exit condensate stream (except for noncondensables).
    (iii) You must perform a material balance for each component, if
the condensate receiver composition is not known.
    (iv) For the emissions from gas evolution, the term for time, t,
must be used in Equation 12 to Sec.  63.1257(d)(2)(i)(B) of this
chapter.
    (v) Emissions from empty vessel purging must be calculated using
Equation 36 to Sec.  63.1257(d)(2)(i)(H) of this chapter and the exit
temperature and exit pressure conditions of the condenser or the
conditions of the dedicated receiver.
    (C) Commercial software products that follow chemical engineering
principles (e.g., including the calculation methodologies in paragraphs
(c)(1)(i)(A) and (c)(1)(i)(B) of this section).
    (ii) Engineering assessments. For process vent emissions
determinations, you may conduct an engineering assessment to calculate
uncontrolled emissions. An engineering assessment includes, but is not
limited to, the following:
    (A) Previous test results, provided the tests are representative of
current operating practices of the process.
    (B) Bench-scale or pilot-scale test data representative of the
process operating conditions.
    (C) Maximum flow rate, fluorinated GHG emission rate,
concentration, or other relevant parameters specified or implied within
a permit limit applicable to the process vent.
    (D) Design analysis based on chemical engineering principles,
measureable process parameters, or physical or chemical laws or
properties.

    (iii) Impact of destruction for the preliminary estimate. If the
process vent is vented to a destruction device, you may reflect the
impact of the destruction device on emissions. In your emissions
estimate, account for the following:
    (A) The destruction efficiencies of the device that have been
demonstrated for the fluorinated GHGs in the vent stream for periods
when the process vent is vented to the destruction device.
    (B) Any periods when the process vent is not vented to the
destruction device.
    (iv) Use of typical recent values. In the calculations in
paragraphs (c)(1)(i), (c)(1)(ii), and (c)(1)(iii) of this section, the
values used for the expected process activity and for the expected
fraction of that activity whose emissions will be vented to the
properly functioning destruction device must be based on either typical
recent values for the process or values that would overestimate
emissions from the process, unless there is a compelling reason to
adopt a different value (e.g., installation of a destruction device for
a previously uncontrolled process). If there is such a reason, it must
be documented in the GHG Monitoring Plan.
    (v) GWPs. To convert the fluorinated GHG emissions to
CO2e, use Equation A-1 of Sec.  98.2. For fluorinated GHGs
whose GWPs are not listed in Table A-1 to subpart A of this part, use a
default GWP of 2,000 unless you submit a request to use other GWPs for
those fluorinated GHGs in that process under paragraph (c)(1)(vi) of
this section and we approve that request.
    (vi) Request to use a GWP other than 2,000 for fluorinated GHGs
whose GWPs are not listed in Table A-1 to subpart A of this part. If
your process vent emits one or more fluorinated GHGs whose GWPs are not
listed in Table A-1 to subpart A of this part, that are emitted in
quantities that, with a default GWP of 2,000, result in total
calculated annual emissions equal to or greater than 10,000 metric tons
CO2e for the vent, and that you believe have GWPs that would
result in total calculated annual emissions less than 10,000 metric
tons CO2e for the vent, you may submit a request to use
provisional GWPs for these fluorinated GHGs for purposes of the
calculations in paragraph (c)(1) of this section. The request must be
submitted by February 28, 2011 for a completeness determination and
review by EPA.
    (A) Contents of the request. You must include the following
information in the request for each fluorinated GHG that does not have
a GWP listed in Table A-1 to subpart A of this part and that
constitutes more than one percent by mass of the stream emitted from
the vent:
    (1) The identity of the fluorinated GHG, including its chemical
formula and, if available, CAS number.
    (2) The estimated GWP of the fluorinated GHG.
    (3) The data and analysis that supports your estimate of the GWP of
the fluorinated GHG, including:
    (i) Data and analysis related to the low-pressure gas phase
infrared absorption spectrum of the fluorinated GHG.
    (ii) Data and analysis related to the estimated atmospheric
lifetime of the fluorinated GHG (reaction mechanisms and rates,
including e.g., photolysis and reaction with atmospheric components
such as OH, O3, CO, and water).
    (iii) The radiative transfer analysis that integrates the lifetime
and infrared absorption spectrum data to calculate the GWP.
    (iv) Any published or unpublished studies of the GWP of the gas.
    (4) The engineering calculations or assessments and underlying data
that demonstrate that the process vent is calculated to emit less than
10,000 metric tons CO2e of this and other fluorinated GHGs
only when the proposed provisional GWPs, not the default GWP of 2,000,
are used for fluorinated GHGs whose GWPs are not listed in Table A-1 to
subpart A of this part.
    (B) Review and completeness determination by EPA. If EPA makes a
preliminary determination that the request is complete, that it
substantiates each of the provisional GWPs, and that it demonstrates
that the process vent is calculated to emit less than 10,000 metric
tons CO2e of this and other fluorinated GHGs only when the
provisional GWPs, not the default GWP of 2,000, are used for
fluorinated GHGs whose GWPs are not listed in Table A-1 to subpart A of
this part, then EPA will publish a notice including the data and
analysis submitted under paragraphs (c)(1)(vi)(A)(1) through
(c)(1)(vi)(A)(3) of this section. If, after review of public comment on
the notice, EPA finalizes its preliminary determination, then EPA will
permit the facility to use the provisional GWPs for the calculations in
paragraph (c)(1) of this section unless and until EPA determines that
one or more of the provisional GWPs is in error and provides reasonable
notice to the facility.
    (2) Method selection for continuous process vents.
    (i) If the calculations under paragraph (c)(1) of this section, as
well as any subsequent measurements and calculations under this
subpart, indicate that the continuous process vent has fluorinated GHG
emissions of less than 10,000 metric ton CO2e per year,
summed across all operating scenarios, then you may comply with either
paragraph (c)(3) of this section (Emission Factor approach) or
paragraph (c)(4) of this section (Emission Calculation Factor
approach).
    (ii) If the continuous process vent does not meet the criteria in
paragraph (c)(2)(i) of this section, then you must comply with the
emission factor method specified in paragraph (c)(3) (Emission Factor
approach) of this section.
    (A) You must conduct emission testing for process-vent-specific
emission factor development before the destruction device unless the
calculations you performed under paragraph (c)(1)(iii) of this section
indicate that the uncontrolled fluorinated GHG emissions that occur
during periods when the process vent is not vented to the properly
functioning destruction device are less than 10,000 metric tons
CO2e per year. In this case, you may conduct emission
testing after the destruction device to develop a process-vent-specific
emission factor. If you do so, you must develop and apply an emission
calculation factor under paragraph (c)(4) to estimate emissions during
any periods when the process vent is not vented to the properly
functioning destruction device.
    (B) Regardless of the level of uncontrolled emissions, the emission
testing for process-vent-specific emission factor development may be
conducted on the outlet side of a wet scrubber in place for acid gas
reduction, if one is in place, as long as there is no appreciable
reduction in the fluorinated GHG.
    (3) Process-vent-specific emission factor method. For each process
vent, conduct an emission test and measure fluorinated GHG emissions
from the process and measure the process activity, such as the feed
rate, production rate, or other process activity rate, during the test
as described in this paragraph (c)(3). Conduct the emission test
according to the procedures in Sec.  98.124. All emissions test data
and procedures used in developing emission factors must be documented
according to Sec.  98.127. If more than one operating scenario applies
to the process that contains the subject process vent, you must comply
with either paragraph (3)(i) or paragraph (3)(ii) of this section.
    (i) Conduct a separate emissions test for operation under each
operating scenario.

    (ii) Conduct an emissions test for the operating scenario that is
expected to have the largest emissions in terms of CO2e
(considering both activity levels and emission calculation factors) on
an annual basis. Also conduct an emissions test for each additional
operating scenario that is estimated to emit 10,000 metric tons
CO2e or more annually from the vent and whose emission
calculation factor differs by 15 percent or more from the emission
calculation factor of the operating scenario that is expected to have
the largest emissions (or of another operating scenario for which
emission testing is performed), unless the difference between the
operating scenarios is solely due to the application of a destruction
device to emissions under one of the operating scenarios. For any other
operating scenarios, adjust the process-vent specific emission factor
developed for the operating scenario that is expected to have the
largest emissions (or for another operating scenario for which emission
testing is performed) using the approach in paragraph (c)(3)(viii) of
this section.
    (iii) You must measure the process activity, such as the process
feed rate, process production rate, or other process activity rate, as
applicable, during the emission test and calculate the rate for the
test period, in kg (or another appropriate metric) per hour.
    (iv) For continuous processes, you must calculate the hourly
emission rate of each fluorinated GHG using Equation L-19 of this
section and determine the hourly emission rate of each fluorinated GHG
per process vent (and per operating scenario, as applicable) for the
test run.
[GRAPHIC] [TIFF OMITTED] TR01DE10.037

Where:

EContPV = Mass of fluorinated GHG f emitted from process
vent v from process i, operating scenario j, during the emission
test during test run r (kg/hr).
CPV = Concentration of fluorinated GHG f during test run
r of the emission test (ppmv).
MW = Molecular weight of fluorinated GHG f (g/g-mole).
QPV = Flow rate of the process vent stream during test
run r of the emission test (m\3\/min).
SV = Standard molar volume of gas (0.0240 m\3\/g-mole at 68 [deg]F
and 1 atm).
1/10\3\ = Conversion factor (1 kilogram/1,000 grams).
60/1 = Conversion factor (60 minutes/1 hour).

    (v) You must calculate a site-specific, process-vent-specific
emission factor for each fluorinated GHG for each process vent and each
operating scenario, in kg of fluorinated GHG per process activity rate
(e.g., kg of feed or production), as applicable, using Equation L-20 of
this section. For continuous processes, divide the hourly fluorinated
GHG emission rate during the test by the hourly process activity rate
during the test runs.
[GRAPHIC] [TIFF OMITTED] TR01DE10.038

Where:

EFPV = Emission factor for fluorinated GHG f emitted from
process vent v during process i, operating scenario j (e.g., kg
emitted/kg activity).
EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, during the emission test
during test run r, for either continuous or batch (kg emitted/hr for
continuous, kg emitted/batch for batch).
ActivityEmissionTest = Process feed, process production,
or other process activity rate for process i, operating scenario j,
during the emission test during test run r (e.g., kg product/hr).
r = Number of test runs performed during the emission test.

    (vi) If you conducted emissions testing after the destruction
device, you must calculate the emissions of each fluorinated GHG for
the process vent (and operating scenario, as applicable) using Equation
L-21 of this section. You must also develop a process-vent-specific
emission calculation factor based on paragraph (c)(4) of this section
for the periods when the process vent is not venting to the destruction
device.
[GRAPHIC] [TIFF OMITTED] TR01DE10.039

Where:

EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, for the year (kg).
EFPV-C = Emission factor for fluorinated GHG f emitted
from process vent v during process i, operating scenario j, based on
testing after the destruction device (kg emitted/activity) (e.g., kg
emitted/kg product).
ActivityC = Total process feed, process production, or
other process activity for process i, operating scenario j, during
the year for which emissions are vented to the properly functioning
destruction device (i.e., controlled).
ECFPV-U = Emission calculation factor for fluorinated GHG
f emitted from process vent v during process i, operating scenario j
during periods when the process vent is not vented to the properly
functioning destruction device (kg emitted/activity) (e.g., kg
emitted/kg product).
ActivityU = Total process feed, process production, or
other process activity during the year for which the process vent is
not vented to the properly functioning destruction device (e.g., kg
product).

    (vii) If you conducted emissions testing before the destruction
device, apply the destruction efficiencies of the device that have been
demonstrated for the fluorinated GHGs in the vent stream to the
fluorinated GHG emissions for the process vent (and operating scenario,
as applicable), using Equation L-22 of this section. You may apply the
destruction efficiency only to the portion of the process activity
during which emissions

are vented to the properly functioning destruction device (i.e.,
controlled).
[GRAPHIC] [TIFF OMITTED] TR01DE10.040

Where:

EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, for the year, considering
destruction efficiency (kg).
EFPV-U = Emission factor (uncontrolled) for fluorinated
GHG f emitted from process vent v during process i, operating
scenario j (kg emitted/kg product).
ActivityU = Total process feed, process production, or
other process activity for process i, operating scenario j, during
the year for which the process vent is not vented to the properly
functioning destruction device (e.g., kg product).
ActivityC = Total process feed, process production, or
other process activity for process i, operating scenario j, during
the year for which the process vent is vented to the properly
functioning destruction device (e.g., kg product).
DE = Demonstrated destruction efficiency of the destruction device
(weight fraction).

    (viii) Adjusted process-vent-specific emission factors for other
operating scenarios. For process vents from processes with multiple
operating scenarios, use Equation L-23 of this section to develop an
adjusted process-vent-specific emission factor for each operating
scenario from which the vent is estimated to emit less than 10,000
metric tons CO2e annually or whose emission calculation
factor differs by less than 15 percent from the emission calculation
factor of the operating scenario that is expected to have the largest
emissions (or of another operating scenario for which emission testing
is performed).
[GRAPHIC] [TIFF OMITTED] TR01DE10.041

Where:

EFPVadj = Adjusted process-vent-specific emission factor
for an untested operating scenario.
ECFUT = Emission calculation factor for the untested
operating scenario developed under paragraph (c)(4) of this section.
ECFT = Emission calculation for the tested operating
scenario developed under paragraph (c)(4) of this section.
EFPV = Process vent specific emission factor for the
tested operating scenario.

    (ix) Sum the emissions of each fluorinated GHG from all process
vents in each operating scenario and all operating scenarios in the
process for the year to estimate the total process vent emissions of
each fluorinated GHG from the process, using Equation L-24 of this
section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.042

Where:

EPfi = Mass of fluorinated GHG f emitted from process
vents for process i for the year (kg).
EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, for the year, considering
destruction efficiency (kg).
v = Number of process vents in process i, operating scenario j.
o = Number of operating scenarios for process i.

    (4) Process-vent-specific emission calculation factor method. For
each process vent within an operating scenario, determine fluorinated
GHG emissions by calculations and determine the process activity rate,
such as the feed rate, production rate, or other process activity rate,
associated with the emission rate.
    (i) You must calculate uncontrolled emissions of fluorinated GHG by
individual process vent, EPV, by using measurements, by
using calculations based on chemical engineering principles and
chemical property data, or by conducting an engineering assessment. Use
the procedures in paragraphs (c)(1)(i) or (ii) of this section, except
paragraph (c)(1)(ii)(C) of this section. The procedures in paragraphs
(c)(1)(i) and (ii) of this section may be applied either to batch
process vents or to continuous process vents. The uncontrolled
emissions must be based on a typical batch or production rate under a
defined operating scenario. The process activity rate associated with
the uncontrolled emissions must be determined. The methods, data, and
assumptions used to estimate emissions for each operating scenario must
be selected to yield a best estimate (expected value) of emissions
rather than an over- or underestimate of emissions for that operating
scenario. All data, assumptions, and procedures used in the
calculations or engineering assessment must be documented according to
Sec.  98.127.
    (ii) You must calculate a site-specific, process-vent-specific
emission calculation factor for each process vent, each operating
scenario, and each fluorinated GHG, in kg of fluorinated GHG per
activity rate (e.g., kg of feed or production) as applicable, using
Equation L-25 of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.043

Where:

ECFPV = Emission calculation factor for fluorinated GHG f
emitted from process vent v during process i, operating scenario j,
(e.g., kg emitted/kg product).
EPV = Average mass of fluorinated GHG f emitted, based on
calculations, from process vent v from process i, operating scenario
j, during the period or batch for which emissions were calculated,
for either continuous or batch (kg emitted/hr for continuous, kg
emitted/batch for batch).
ActivityRepresentative = Process feed, process
production, or other process activity rate corresponding to average
mass of emissions based on calculations (e.g., kg product/hr for
continuous, kg product/batch for batch).

    (iii) You must calculate emissions of each fluorinated GHG for the
process vent (and operating scenario, as applicable) for the year by
multiplying

the process-vent-specific emission calculation factor by the total
process activity, as applicable, for the year, using Equation L-26 of
this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.044

Where:

EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, for the year (kg).
ECFPV = Emission calculation factor for fluorinated GHG f
emitted from process vent v during process i, operating scenario j,
(kg emitted/activity) (e.g., kg emitted/kg product).
Activity = Process feed, process production, or other process
activity for process i, operating scenario j, during the year.

    (iv) If the process vent is vented to a destruction device, apply
the demonstrated destruction efficiency of the device to the
fluorinated GHG emissions for the process vent (and operating scenario,
as applicable), using Equation L-27 of this section. Apply the
destruction efficiency only to the portion of the process activity that
is vented to the properly functioning destruction device (i.e.,
controlled).
[GRAPHIC] [TIFF OMITTED] TR01DE10.045

Where:

EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, for the year considering
destruction efficiency (kg).
ECFPV = Emission calculation factor for fluorinated GHG f
emitted from process vent v during process i, operating scenario j,
(e.g., kg emitted/kg product).
ActivityU = Total process feed, process production, or
other process activity for process i, operating scenario j, during
the year for which the process vent is not vented to the properly
functioning destruction device (e.g., kg product).
ActivityC = Total process feed, process production, or
other process activity for process i, operating scenario j, during
the year for which the process vent is vented to the properly
functioning destruction device (e.g., kg product).
DE = Demonstrated destruction efficiency of the destruction device
(weight fraction).

    (v) Sum the emissions of each fluorinated GHG from all process
vents in each operating scenario and all operating scenarios in the
process for the year to estimate the total process vent emissions of
each fluorinated GHG from the process, using Equation L-28 of this
section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.046

Where:

EPfi = Mass of fluorinated GHG f emitted from process
vents for process i for the year (kg).
EPV = Mass of fluorinated GHG f emitted from process vent
v from process i, operating scenario j, for the year, considering
destruction efficiency (kg).
v = Number of process vents in process i, operating scenario j.
o = Number of operating scenarios in process i.

    (d) Calculate fluorinated GHG emissions for equipment leaks (EL).
If you comply with paragraph (c) of this section, you must calculate
the fluorinated GHG emissions from pieces of equipment associated with
processes covered under this subpart and in fluorinated GHG service. If
you conduct monitoring of equipment in fluorinated GHG service,
monitoring must be conducted for those in light liquid and in gas and
vapor service. If you conduct monitoring of equipment in fluorinated
GHG service, you may exclude from monitoring each piece of equipment
that is difficult-to-monitor, that is unsafe-to-monitor, that is
insulated, or that is in heavy liquid service; you may exclude from
monitoring each pump with dual mechanical seals, agitator with dual
mechanical seals, pump with no external shaft, agitator with no
external shaft; you may exclude from monitoring each pressure relief
device in gas and vapor service with upstream rupture disk, each
sampling connection system with closed-loop or closed-purge systems,
and any pieces of equipment where leaks are routed through a closed
vent system to a destruction device. You must estimate emissions using
another approach for those pieces of equipment excluded from
monitoring. Equipment that is in fluorinated GHG service for less than
300 hr/yr; equipment that is in vacuum service; pressure relief devices
that are in light liquid service; and instrumentation systems are
exempted from these requirements.
    (1) The emissions from equipment leaks must be calculated using any
of the procedures in paragraphs (d)(1)(i), (d)(1)(ii), (d)(1)(iii), or
(d)(1)(iv) of this section.
    (i) Use of Average Emission Factor Approach in EPA Protocol for
Equipment Leak Emission Estimates. The emissions from equipment leaks
may be calculated using the default Average Emission Factor Approach in
EPA-453/R-95-017 (incorporated by reference, see Sec.  98.7).
    (ii) Use of Other Approaches in EPA Protocol for Equipment Leak
Emission Estimates in conjunction with EPA Method 21 at 40 CFR part 60,
appendix A-7. The emissions from equipment leaks may be calculated
using one of the following methods in EPA-453/R-95-017 (incorporated by
reference, see Sec.  98.7): The Screening Ranges Approach; the EPA
Correlation Approach; or the Unit-Specific Correlation Approach. If you
determine that EPA Method 21 at 40 CFR part 60, appendix A-7 is
appropriate for monitoring a fluorinated GHG, and if you calibrate your
instrument with a compound different from one or more of the
fluorinated GHGs or surrogates to be measured, you must develop
response factors for each fluorinated GHG or for each surrogate to be
measured using EPA Method 21 at 40 CFR part 60, appendix A-7. For each
fluorinated GHG or surrogate measured, the response factor must be less
than 10. The response factor is the ratio of the known concentration of
a fluorinated GHG or surrogate to the observed meter reading when
measured using an instrument calibrated with the reference compound.
    (iii) Use of Other Approaches in EPA Protocol for Equipment Leak
Emission Estimates in conjunction with site-specific leak monitoring
methods. The emissions from equipment leaks may be calculated using one
of the following methods in EPA-453/R-95-017 (incorporated by
reference, see Sec.  98.7): The Screening Ranges Approach; the EPA
Correlation Approach; or the Unit-Specific Correlation Approach. You
may develop a site-specific leak monitoring method appropriate for
monitoring fluorinated GHGs or surrogates to use along with these three
approaches. The site-specific leak monitoring method

must meet the requirements in Sec.  98.124(f)(1).
    (iv) Use of site-specific leak monitoring methods. The emissions
from equipment leaks may be calculated using a site-specific leak
monitoring method. The site-specific leak monitoring method must meet
the requirements in Sec.  98.124(f)(1).
    (2) You must collect information on the number of each type of
equipment; the service of each piece of equipment (gas, light liquid,
heavy liquid); the concentration of each fluorinated GHG in the stream;
and the time period each piece of equipment was in service. Depending
on which approach you follow, you may be required to collect
information for equipment on the associated screening data
concentrations for greater than or equal to 10,000 ppmv and associated
screening data concentrations for less than 10,000 ppmv; associated
actual screening data concentrations; or associated screening data and
leak rate data (i.e., bagging) used to develop a unit-specific
correlation.
    (3) Calculate and sum the emissions of each fluorinated GHG in
metric tons per year for equipment pieces for each process,
EELf, annually. You must include and estimate emissions for
types of equipment that are excluded from monitoring, including
difficult-to-monitor, unsafe-to-monitor and insulated pieces of
equipment, pieces of equipment in heavy liquid service, pumps with dual
mechanical seals, agitators with dual mechanical seals, pumps with no
external shaft, agitators with no external shaft, pressure relief
devices in gas and vapor service with upstream rupture disk, sampling
connection systems with closed-loop or closed purge systems, and pieces
of equipment where leaks are routed through a closed vent system to a
destruction device.
    (e) Calculate total fluorinated GHG emissions for each process and
for production or transformation processes at the facility.
    (i) Estimate annually the total mass of each fluorinated GHG
emitted from each process, including emissions from process vents in
paragraphs (c)(3) and (c)(4) of this section, as appropriate, and from
equipment leaks in paragraph (d), using Equation L-29 of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.047

Where:

Ei = Total mass of each fluorinated GHG f emitted from
process i, annual basis (kg/year).
EPfi = Mass of fluorinated GHG f emitted from all process
vents and all operating scenarios in process i, annually (kg/year,
calculated in Equation L-24 or L-28 of this section, as
appropriate).
EELfi = Mass of fluorinated GHG f emitted from equipment
leaks for pieces of equipment for process i, annually (kg/year,
calculated in paragraph (d)(3) of this section).

    (ii) Estimate annually the total mass of each fluorinated GHG
emitted from each type of production or transformation process at the
facility using Equation L-30 of this section. Develop separate totals
for fluorinated gas production processes, transformation processes that
transform fluorinated gases produced at the facility, and
transformation processes that transform fluorinated gases produced at
another facility.
[GRAPHIC] [TIFF OMITTED] TR01DE10.048

Where:

E = Total mass of each fluorinated GHG f emitted from all
fluorinated gas production processes, all transformation processes
that transform fluorinated gases produced at the facility, or all
transformation processes that transform fluorinated gases produced
at another facility, as appropriate (metric tons).
Ei = Total mass of each fluorinated GHG f emitted from
each production or transformation process, annual basis (kg/year,
calculated in Equation L-29 of this section).
0.001 = Conversion factor from kg to metric tons.
z = Total number of fluorinated gas production processes,
fluorinated gas transformation processes that transform fluorinated
gases produced at the facility, or transformation processes that
transform fluorinated gases produced at another facility, as
appropriate.

    (f) Calculate fluorinated GHG emissions from destruction of
fluorinated GHGs that were previously ``produced''. Estimate annually
the total mass of fluorinated GHGs emitted from destruction of
fluorinated GHGs that were previously ``produced'' as defined at Sec.
98.410(b) using Equation L-31 of this section:
[GRAPHIC] [TIFF OMITTED] TR01DE10.049

Where:

ED = The mass of fluorinated GHGs emitted annually from
destruction of fluorinated GHGs that were previously ``produced'' as
defined at Sec.  98.410(b) (metric tons).
RED = The mass of fluorinated GHGs that were previously
``produced'' as defined at Sec.  98.410(b) and that are fed annually
into the destruction device (metric tons).
DE = Destruction efficiency of the destruction device (fraction).

    (g) Emissions from venting of residual fluorinated GHGs in
containers. If you vent residual fluorinated GHGs from containers, you
must either measure the residual fluorinated GHGs vented from each
container or develop a heel factor for each combination of fluorinated
GHG, container size, and container type that you vent. You do not need
to estimate de minimis emissions associated with good-faith attempts to
recycle or recover residual fluorinated GHGs in or from containers.
    (1) Measuring contents of each container. If you weigh or otherwise
measure the contents of each container before venting the residual
fluorinated GHGs, use Equation L-32 of this section to calculate annual
emissions of each fluorinated GHG from venting of residual fluorinated
GHG from containers. Convert pressures to masses as directed in
paragraph (g)(2)(ii) of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.050

Where:

ECf = Total mass of each fluorinated GHG f emitted from
the facility through venting of residual fluorinated GHG from
containers, annual basis (kg/year).
HBfj = Mass of residual fluorinated GHG f in container j
when received by facility.
HEfj = Mass of residual fluorinated GHG f in container j
after evacuation by facility. (Facility may equate to zero.)
n = Number of vented containers for each fluorinated GHG f.

    (2) Developing and applying heel factors. If you use heel factors
to

estimate emissions of residual fluorinated GHGs vented from containers,
you must annually develop these factors based on representative samples
of the containers received by your facility from fluorinated GHG users.
    (i) Sample size. For each combination of fluorinated GHG, container
size, and container type that you vent, select a representative sample
of containers that reflects the full range of quantities of residual
gas returned in that container size and type. This sample must reflect
the full range of the industries and a broad range of the customers
that use and return the fluorinated GHG, container size, and container
type. The minimum sample size for each combination of fluorinated GHG,
container size, and container type must be 30, unless this is greater
than the number of containers returned within that combination
annually, in which case the contents of every container returned must
be measured.
    (ii) Measurement of residual gas. The residual weight or pressure
you use for paragraph (g)(1) of this section must be determined by
monitoring the mass or the pressure of your cylinders/containers
according to Sec.  98.124(k). If you monitor the pressure, convert the
pressure to mass using the ideal gas law, as displayed in Equation L-33
of this section, with an appropriately selected Z value.
[GRAPHIC] [TIFF OMITTED] TR01DE10.051

Where:

p = Absolute pressure of the gas (Pa)
V = Volume of the gas (m\3\)
Z = Compressibility factor
n = Amount of substance of the gas (moles)
R = Gas constant (8.314 Joule/Kelvin mole)
T = Absolute temperature (K)
    (iii) Heel factor calculation. To determine the heel factor
hfj for each combination of fluorinated GHG, container size,
and container type, use paragraph (g)(1) of this section to calculate
the total heel emissions for each sample selected under paragraph
(g)(2)(i) of this section. Divide this total by the number of
containers in the sample. Divide the result by the full capacity (the
mass of the contents of a full container) of that combination of
fluorinated GHG, container size, and container type. The heel factor is
expressed as a fraction of the full capacity.
    (iv) Calculate annual emissions of each fluorinated GHG from
venting of residual fluorinated GHG from containers using Equation L-34
of this section.
[GRAPHIC] [TIFF OMITTED] TR01DE10.052

Where:

ECf = Total mass of each fluorinated GHG f emitted from
the facility through venting of residual fluorinated GHG from
containers, annual basis (kg/year).
hfj = Facility-wide gas-specific heel factor for
fluorinated GHG f (fraction) and container size and type j, as
determined in paragraph (g)(2)(iii) of this section.
Nfj = Number of containers of size and type j returned to
the fluorinated gas production facility.
Ffj = Full capacity of containers of size and type j
containing fluorinated GHG f (kg).
n = Number of combinations of container sizes and types for
fluorinated GHG f.

Sec.  98.124  Monitoring and QA/QC requirements.

    (a) Initial scoping speciation to identify fluorinated GHGs. You
must conduct an initial scoping speciation to identify all fluorinated
GHGs that may be generated from processes that are subject to this
subpart and that have at least one process vent with uncontrolled
emissions of 1.0 metric ton or more of fluorinated GHGs per year based
on the preliminary estimate of emissions in Sec.  98.123(c)(1). You are
not required to quantify emissions under this initial scoping
speciation. Only fluorinated GHG products and by-products that occur in
greater than trace concentrations in at least one stream must be
identified under this paragraph.
    (1) Procedure. To conduct the scoping speciation, select the
stream(s) (including process streams or destroyed streams) or process
vent(s) that would be expected to individually or collectively contain
all of the fluorinated GHG by-products of the process at their maximum
concentrations and sample and analyze the contents of these selected
streams or process vents. For example, if fluorinated GHG by-products
are separated into one low-boiling-point and one high-boiling-point
stream, sample and analyze both of these streams. Alternatively, you
may sample and analyze streams where fluorinated GHG by-products occur
at less than their maximum concentrations, but you must ensure that the
sensitivity of the analysis is sufficient to compensate for the
expected difference in concentration. For example, if you sample and
analyze streams where fluorinated GHG by-products are expected to occur
at one half their maximum concentrations elsewhere in the process, you
must ensure that the sensitivity of the analysis is sufficient to
detect fluorinated GHG by-products that occur at concentrations of 0.05
percent or higher. You do not have to sample and analyze every stream
or process vent, i.e., you do not have to sample and analyze a stream
or process vent that contains only fluorinated GHGs that are contained
in other streams or process vents that are being sampled and analyzed.
Sampling and analysis must be conducted according to the procedures in
paragraph (e) of this section.
    (2) Previous measurements. If you have conducted testing of streams
(including process streams or destroyed streams) or process vents less
than 10 years before December 31, 2010, and the testing meets the
requirements in paragraph (a)(1) of this section, you may use the
previous testing to satisfy this requirement.
    (b) Mass balance monitoring. If you determine fluorinated GHG
emissions from any process using the mass balance method under Sec.
98.123(b), you must estimate the total mass of each fluorinated GHG
emitted from that process at least monthly. Only streams that contain
greater than trace concentrations of fluorine-containing reactants,
products, or by-products must be monitored under this paragraph. If you
use an element other than fluorine in the mass-balance equation
pursuant to Sec.  98.123(b)(3), substitute that element for fluorine in
the monitoring requirements of this paragraph.
    (1) Mass measurements. Measure the following masses on a monthly or
more frequent basis using flowmeters, weigh scales, or a combination of
volumetric and density measurements with accuracies and precisions that
allow the facility to meet the error criteria in Sec.  98.123(b)(1):
    (i) Total mass of each fluorine-containing product produced.
Account for any used fluorine-containing product added into the
production process upstream of the output measurement as directed at
Sec.  98.413(b) and Sec.  98.414(b). For each product, the mass
produced used for the mass-balance calculation must be the same as

the mass produced that is reported under subpart OO of this part, where
applicable.
    (ii) Total mass of each fluorine-containing reactant fed into the
process.
    (iii) The mass removed from the process in each stream fed into the
destruction device.
    (iv) The mass removed from the process in each recaptured stream.
    (2) Concentration measurements for use with Sec.  98.123(b)(4). If
you use Sec.  98.123(b)(4) to estimate the mass of fluorine in
destroyed or recaptured streams, measure the following concentrations
at least once each calendar month during which the process is
operating, on a schedule to ensure that the measurements are
representative of the full range of process conditions (e.g., catalyst
age). Measure more frequently if this is necessary to meet the error
criteria in Sec.  98.123(b)(1). Use equipment and methods (e.g., gas
chromatography) that comply with paragraph (e) of this section and that
have an accuracy and precision that allow the facility to meet the
error criteria in Sec.  98.123(b)(1). Only fluorine-containing
reactants, products, and by-products that occur in a stream in greater
than trace concentrations must be monitored under this paragraph.
    (i) The concentration (mass fraction) of the fluorine-containing
product in each stream that is fed into the destruction device.
    (ii) The concentration (mass fraction) of each fluorine-containing
by-product in each stream that is fed into the destruction device.
    (iii) The concentration (mass fraction) of each fluorine-containing
reactant in each stream that is fed into the destruction device.
    (iv) The concentration (mass fraction) of each fluorine-containing
by-product in each stream that is recaptured (cBkl).
    (3) Concentration measurements for use with Sec.  98.123(b)(15). If
you use Sec.  98.123(b)(15) to estimate the mass of fluorine in
destroyed or recaptured streams, measure the concentrations listed in
paragraphs (3)(i) and (ii) of this section at least once each calendar
month during which the process is operating, on a schedule to ensure
that the measurements are representative of the full range of process
conditions (e.g., catalyst age). Measure more frequently if this is
necessary to meet the error criteria in Sec.  98.123(b)(1). Use
equipment and methods (e.g., gas chromatography) that comply with
paragraph (e) of this section and that have an accuracy and precision
that allow the facility to meet the error criteria in Sec.
98.123(b)(1). Only fluorine-containing reactants, products, and by-
products that occur in a stream in greater than trace concentrations
must be monitored under this paragraph.
    (i) The concentration (mass fraction) of total fluorine in each
stream that is fed into the destruction device.
    (ii) The concentration (mass fraction) of total fluorine in each
stream that is recaptured.
    (4) Emissions characterization: process vents emitting 25,000
metric tons CO2e or more. To characterize emissions from any process
vent emitting 25,000 metric tons CO2e or more, comply with
paragraphs (b)(4)(i) through (b)(4)(v) of this section, as appropriate.
Only fluorine-containing reactants, products, and by-products that
occur in a stream in greater than trace concentrations must be
monitored under this paragraph.
    (i) Uncontrolled emissions. If emissions from the process vent are
not routed through a destruction device, sample and analyze emissions
at the process vent or stack or sample and analyze emitted streams
before the process vent. If the process has more than one operating
scenario, you must either perform the emission characterization for
each operating scenario or perform the emission characterization for
the operating scenario that is expected to have the largest emissions
and adjust the emission characterization for other scenarios using
engineering calculations and assessments as specified in Sec.
98.123(c)(4). To perform the characterization, take three samples under
conditions that are representative for the operating scenario. Measure
the concentration of each fluorine-containing compound in each sample.
Use equipment and methods that comply with paragraph (e) of this
section. Calculate the average concentration of each fluorine-
containing compound across all three samples.
    (ii) Controlled emissions using Sec.  98.123(b)(15). If you use
Sec.  98.123(b)(15) to estimate the total mass of fluorine in destroyed
or recaptured streams, and if the emissions from the process vent are
routed through a destruction device, characterize emissions as
specified in paragraph (b)(4)(i) of this section before the destruction
device. Apply the destruction efficiency demonstrated for each
fluorinated GHG in the destroyed stream to that fluorinated GHG.
Exclude from the characterization fluorine-containing compounds that
are not fluorinated GHGs.
    (iii) Controlled emissions using Sec.  98.123(b)(4). If you use
Sec.  98.123(b)(4) to estimate the mass of fluorine in destroyed or
recaptured streams, and if the emissions from the process vent are
routed through a destruction device, characterize the process vent's
emissions monthly (or more frequently) using the monthly (or more
frequent) measurements under paragraphs (b)(1)(iii) and (b)(2)(i)
through (b)(2)(iii) of this section. Apply the destruction efficiency
demonstrated for each fluorinated GHG in the destroyed stream to that
fluorinated GHG. Exclude from the characterization fluorine-containing
compounds that are not fluorinated GHGs.
    (iv) Emissions characterization frequency. You must repeat emission
characterizations performed under paragraph (b)(4)(i) and (b)(4)(ii) of
this section under paragraph (b)(4)(iv)(A) or (b)(4)(iv)(B) of this
section, whichever occurs first:
    (A) 10-year revision. Repeat the emission characterization every 10
years. In the calculations under Sec.  98.123, apply the revised
emission characterization to the process activity that occurs after the
revision.
    (B) Operating scenario change that affects the emission
characterization. For planned operating scenario changes, you must
estimate and compare the emission calculation factors for the changed
operating scenario and for the original operating scenario whose
process vent specific emission factor was measured. Use the engineering
calculations and assessments specified in Sec.  98.123(c)(4). If the
share of total fluorine-containing compound emissions represented by
any fluorinated GHG changes under the changed operating scenario by 15
percent or more of the total, relative to the previous operating
scenario (this includes the cumulative change in the emission
calculation factor since the last emissions test), you must repeat the
emission characterization. Perform the emission characterization before
February 28 of the year that immediately follows the change. In the
calculations under Sec.  98.123, apply the revised emission
characterization to the process activity that occurs after the
operating scenario change.
    (v) Subsequent measurements. If a process vent with fluorinated GHG
emissions less than 25,000 metric tons CO2e, per Sec.
98.123(c)(2), is later found to have fluorinated GHG emissions of
25,000 metric tons CO2e or greater, you must perform an
emission characterization under this paragraph during the following
year.
    (5) Emissions characterization: process vents emitting less than