                             SUPPORTING STATEMENT
                        ENVIRONMENTAL PROTECTION AGENCY

NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal)

1.  Identification of the Information Collection

      1(a)  Title of the Information Collection

NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal),    EPA ICR Number 2042.05, OMB Control Number 2060-0519

      1(b)  Short Characterization/Abstract

      The National Emission Standards for Hazardous Air Pollutants (NESHAP), for semiconductor manufacturing were proposed on May 8, 2002, (67 FR 30848), promulgated on May 22, 2003 (68 FR 27925), and amended on July 22, 2008, (73 FR 42529). These regulations apply to each new, reconstructed, or existing affected major source that emits or has the potential to emit, considering controls, in the aggregate, any single hazardous air pollutants (HAP) at             a rate of 10 tons per year (tpy) or more or any combination of HAP at a rate of 25 tpy or more.  Semiconductor manufacturing process units are used to manufacture p-type and n-type semiconductors and active solid-state devices from a water substrate, including research               and development activities integrated into a semiconductor manufacturing process unit.                   A semiconductor manufacturing process unit includes the equipment assembled and connected   by ductwork or hard-piping including furnaces and associated unit operations; associated wet and dry work benches; associated recovery devices; feed, intermediate, and product storage tanks; product transfer racks and connected ducts and piping; pumps, compressors, agitators, pressure-relief devices, sampling connecting systems, open-ended valves or lines, valves, connectors, and instrumentation systems; and control devices. This information is being    collected to assure compliance with 40 CFR part 63, Subpart BBBBB.

      In general, all NESHAP standards require initial notifications, performance tests, and periodic reports by the owners/operators of the affected facilities.  They are also required to maintain records of the occurrence and duration of any startup, shutdown, or malfunction in the operation of an affected facility, or any period during which the monitoring system is inoperative.  These notifications, reports, and records are essential in determining compliance, and are required of all affected facilities subject to NESHAP.

      Any owner/operator subject to the provisions of this part shall maintain a file of these measurements, and retain the file for at least five years following the date of such measurements, maintenance reports, and records.  All reports are sent to the delegated state or local authority.       In the event that there is no such delegated authority, the reports are sent directly to the U. S. Environmental Protection Agency (EPA) regional office.

      Based on our consultations with industry representatives, there are 127 facilities; however, only one of which is considered a major source. The other 126 non-major sources only read the rule for the first year.

      Over the next three years, an average of one respondent per year will be subject to the standard, and no additional respondents will become subject to the standard.

      The Office of Management and Budget (OMB) approved the currently active ICR without any "Terms of Clearance."

      The semiconductor facilities in the United States are owned and operated by the semiconductor manufacturing industry (the "Affected Public").  These facilities in the United States are not owned by any state, local, tribal entities or by the Federal government.  These facilities are privately-owned, for-profit businesses.  The burden to the "Affected Public" may     be found below in Table 1: Annual Respondent Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).  The burden to the "Federal Government" is attributed entirely to work performed by either Federal employees or government contractors. The burden to the "Federal Government" may be found below in Table 2: Average Annual EPA Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).

2.  Need for and Use of the Collection

      2(a)  Need/Authority for the Collection

      The EPA is charged under section 112 of the Clean Air Act, as amended, to establish standards of performance for each category or subcategory of major sources and area sources of hazardous air pollutants.  These standards are applicable to new or existing sources of hazardous air pollutants and shall require the maximum degree of emission reduction.  In addition, section 114(a) states that the Administrator may require any owner or operator subject to any requirement of this Act to:

            (A) Establish and maintain such records; (B) make such reports;    (C) install, use, and maintain such monitoring equipment, and use such audit procedures, or methods; (D) sample such emissions (in accordance with such procedures or methods, at such locations, at such intervals, during such periods, and in such manner as the Administrator shall prescribe); (E) keep records on control equipment parameters, production variables or other indirect data when direct monitoring of emissions is impractical; (F) submit compliance certifications in accordance with Section 114(a)(3);   and (G) provide such other information as the Administrator may reasonably require.

      In the Administrator's judgment, HAP emissions from semiconductor manufacturing facilities cause or contribute to air pollution that may reasonably be anticipated to endanger public health or welfare.  Therefore, the NESHAP standards were promulgated for this source category at 40 CFR part 63, subpart BBBBB.
      2(b)  Practical Utility/Users of the Data

      The recordkeeping and reporting requirements in the standard ensure compliance with the applicable regulations which were promulgated in accordance with the Clean Air Act.  In addition, the collected information is used for targeting inspections and as evidence in legal proceedings.

      Performance tests are required in order to determine an affected facility's initial capability to comply with the emission standard.  Continuous emission monitors are used to ensure compliance with the standard at all times.  During the performance tests, a record of the operating parameters under which compliance was achieved may be recorded and used to determine compliance in place of a continuous emission monitor.

      The notifications required in the standard are used to inform the Agency or delegated authority when a source becomes subject to the requirements of the regulations.  The reviewing authority may then inspect the source to ensure that the pollution control devices are properly installed and operated, that leaks are being detected and repaired, and that the standards are being met.  The performance test may also be observed.

      The required semiannual reports are used to determine periods of excess emissions, identify problems at the facility, verify operation/maintenance procedures and for compliance determinations.

3.  Non-duplication, Consultations, and Other Collection Criteria

      The requested recordkeeping and reporting are required under 40 CFR part 63, subpart BBBBB.

      3(a)  Non-duplication

      If the subject standards have not been delegated, the information is sent directly to the appropriate EPA regional office.  Otherwise, the information is sent directly to the delegated state or local agency.  If a state or local agency has adopted their own similar standards to implement the Federal standards, a copy of the report submitted to the state or local agency can be sent to the Administrator in lieu of the report required by the Federal standards.  Therefore, no duplication exists.

      3(b)  Public Notice Required Prior to ICR Submission to OMB
      An announcement of a public comment period for the renewal of this ICR was published in the Federal Register (76 FR 26900) on May 9, 2011.  No comments were received on the burden published in the Federal Register.

      3(c)  Consultations

      The Agency industry experts have been consulted, and the Agency internal data sources and projections of industry growth over the next three years have been considered.  The primary source of information as reported by industry, in compliance with the recordkeeping and reporting provisions in the standard, is the Online Tracking Information System (OTIS) which is operated and maintained by the EPA Office of Compliance.  OTIS is the EPA database for the collection, maintenance, and retrieval of all compliance data.  The growth rate for the industry is based on our consultations with the Agency internal industry experts.

      Industry trade associations and other interested parties were provided an opportunity to comment on the burden associated with the standard as it was being developed.  In developing this ICR, we contacted: 1) the Semiconductor Industry Association (SIA), at<PHONE_NUMBER>; 2) the Fab Owners Association (FOA), at<PHONE_NUMBER>; and 3) Semiconductor Equipment and Materials International (SEMI), at<PHONE_NUMBER>.

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      It is our policy to respond after a thorough review of comments received since the last ICR renewal as well as to those submitted in response to the first Federal Register notice.
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      3(d)  Effects of Less Frequent Collection

      Less frequent information collection would decrease the margin of assurance that facilities are continuing to meet the standards.  Requirements for information gathering and recordkeeping are useful techniques to ensure that good operation and maintenance practices are applied and emission limitations are met.  If the information required by these standards was collected less frequently, the proper operation and maintenance of control equipment and the possibility of detecting violations would be less likely.

      3(e)  General Guidelines

      These reporting or recordkeeping requirements do not violate any of the regulations established by OMB at 5 CFR part 1320, section 1320.5.

      These standards require the respondents to maintain all records, including reports and notifications for at least five years.  This is consistent with the General Provisions as applied to the standards.  EPA believes that the five-year records retention requirement is consistent with the part 70 permit program and the five-year statute of limitations on which the permit program is based.  The retention of records for five years allows EPA to establish the compliance history of a source, any pattern of non-compliance, and to determine the appropriate level of enforcement action.   EPA has found that the most flagrant violators have violations extending beyond the five years.    In addition, EPA would be prevented from pursuing the violators due to the destruction or nonexistence of essential records.

      3(f)  Confidentiality

      Any information submitted to the Agency for which a claim of confidentiality is made will be safeguarded according to the Agency policies set forth in title 40, chapter 1, part 2, subpart B - Confidentiality of Business Information (CBI) (see 40 CFR 2; 41 FR 36902, September 1, 1976; amended by 43 FR 40000, September 8, 1978; 43 FR 42251, September 20, 1978; 44 FR 17674, March 23, 1979).

      3(g)  Sensitive Questions

      The reporting or recordkeeping requirements in the standard do not include sensitive questions.

4.  The Respondents and the Information Requested

      4(a)  Respondents/SIC Codes

      The respondents to the recordkeeping and reporting requirements are owners or operators of semiconductor manufacturing facilities.  The United States Standard Industrial Classification (SIC) code for the respondents affected by the standard is SIC 3674, which correspond to the North American Industry Classification System (NAICS) code 334413 for semiconductor manufacturing.

      4(b)  Information Requested

            (i)  Data Items

      In this ICR, all the data that is recorded or reported is required by NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB).

      A source must make the following reports:

                             Notification Reports
Initial notification
63.9(b)(2)-(3), 63.7189(b)-(c)
Notification of performance test
63.7(b)-(c), 63.9(e), 63.7189(d)
Notification of compliance status
63.9(h), 63.10(d)(2), 63.7189(e)
Performance evaluation reports
63.8(e)(5), 63.7191(a)(e)
Startup, shutdown, malfunction
63.6(e)(3), 63.7190(a)(2)
Semiannual summary report
63.7190

      A source must keep the following records:

                                 Recordkeeping
Initial notification or notification of compliance status
63.10(b)(2)(xiv), 63.7191(a)(1)
Record of startup, shutdown, malfunctions
63.6(e)(3), 63.7191(a)(2)
Records of performance tests and performance evaluations
63.10(b)(2)(viii), 63.7191(a)(3)
Records are required to be retained for five years
63.10(b)(2)

Electronic Reporting

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      Some of the respondents are using monitoring equipment that automatically records parameter data.  Although personnel at the affected facility must still evaluate the data, internal automation has significantly reduced the burden associated with monitoring and recordkeeping at a plant site.
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      Also, regulatory agencies in cooperation with the respondents continue to create reporting systems to transmit data electronically.  However, electronic reporting systems are not widely used.  At this time, it is estimated that none of the respondents use electronic reporting.
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      (ii)  Respondent Activities
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                             Respondent Activities
Read instructions.
Perform initial performance test, Reference Methods 320, 26, 26A test, and repeat performance test is necessary.
Write the notifications and reports listed above.
Enter information required to be recorded above.
Submit the required reports developing, acquiring, installing, and utilizing technology and systems for the purpose of collecting, validating, and verifying information.
Develop, acquire, install, and utilize technology and systems for the purpose of processing and maintaining information.
Develop, acquire, install, and utilize technology and systems for the purpose of disclosing and providing information.
Adjust the existing ways to comply with any previously applicable instructions and requirements.
Train personnel to be able to respond to a collection of information.
Transmit, or otherwise disclose the information.

	Currently, sources are using monitoring equipment that provides parameter data in an automated way (e.g., continuous parameter monitoring system).  Although personnel at the source still need to evaluate the data, this type of monitoring equipment has significantly reduced the burden associated with monitoring and recordkeeping.

5.  The Information Collected: Agency Activities, Collection Methodology, and Information Management

      5(a)  Agency Activities

      EPA conducts the following activities in connection with the acquisition, analysis, storage, and distribution of the required information.

                               Agency Activities
Observe initial performance tests and repeat performance tests if necessary.
Review notifications and reports, including performance test reports, excess emissions reports, required to be submitted by industry.
Audit facility records.
Input, analyze, and maintain data in the OTIS.

      5(b)  Collection Methodology and Management

Following notification of startup, the reviewing authority could inspect the source to determine whether the pollution control devices are properly installed and operated.   Performance test reports are used by the Agency to discern a source's initial capability to comply with the emission standard.  Data and records maintained by the respondents are tabulated and published for use in compliance and enforcement programs.  The semiannual reports are used for problem identification, as a check on source operation and maintenance, and for compliance determinations.

      Information contained in the reports is entered into OTIS which is operated and maintained by the EPA Office of Compliance.  OTIS is the EPA database for the collection, maintenance, and retrieval of compliance data for approximately 125,000 industrial and government-owned facilities.  EPA uses OTIS for tracking air pollution compliance and enforcement by local and state regulatory agencies, EPA regional offices, and EPA headquarters.  EPA-delegated authorities can edit, store, retrieve and analyze the data.

      The records required by this regulation must be retained by the owner or operator for five years.

      5(c)  Small Entity Flexibility

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      A majority of the respondents are large entities (i.e., large businesses).  However, the impact on small entities (i.e., small businesses) was taken into consideration during the development of the regulation.  Due to technical considerations involving the process operations and the types of control equipment employed, the recordkeeping and reporting requirements are the same for both small and large entities.  The Agency considers these to be the minimum requirements needed to ensure compliance and, therefore, cannot reduce them further for small entities.  To the extent that larger businesses can use economies of scale to reduce their burden,   the overall burden will be reduced.

      5(d)  Collection Schedule

      The specific frequency for each information collection activity within this request is shown below in Table 1: Annual Respondent Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).

6.  Estimating the Burden and Cost of the Collection

      Table 1 documents the computation of individual burdens for the recordkeeping and reporting requirements applicable to the industry for the subpart included in this ICR.  The individual burdens are expressed under standardized headings believed to be consistent with the concept of burden under the Paperwork Reduction Act.  Wherever appropriate, specific tasks and major assumptions have been identified.  Responses to this information collection are mandatory.

      The Agency may not conduct or sponsor, and a person is not required to respond to, a collection of information unless it displays a currently valid OMB Control Number.

      6(a)  Estimating Respondent Burden

      The average annual burden to industry over the next three years from these recordkeeping and reporting requirements is estimated to be 37 (Total Labor Hours from Table 1 below).        These hours are based on Agency studies and background documents from the development of   the regulation, Agency knowledge and experience with the NESHAP program, the previously approved ICR, and any comments received.

      6(b)  Estimating Respondent Costs

            (i)  Estimating Labor Costs

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      This ICR uses the following labor rates:
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      Managerial	$121.42 ($57.82 + 110%)
		Technical	$99.14   ($47.21 + 110%)
		Clerical	$49.81   ($23.72 + 110%)
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These rates are from the United States Department of Labor, Bureau of Labor Statistics, September, 2011, "Table 2. Civilian Workers, by Occupational and Industry group."  The rates are from column 1, "Total compensation."  The rates have been increased by 110 percent to account for the benefit packages available to those employed by private industry.

            (ii)  Estimating Capital/Startup and Operation and Maintenance Costs

      The type of industry costs associated with the information collection activities in the subject standard are labor costs which are addressed elsewhere in this ICR, and the costs associated with continuous monitoring.  The capital/startup costs are one-time costs when a facility becomes subject to the regulation.  The annual operation and maintenance costs are the ongoing costs to maintain the monitor and other costs, such as photocopying and postage.

            (iii)  Capital/Startup vs. Operation and Maintenance (O&M) Costs

         Capital/Startup vs. Operation and Maintenance (O&M) Costs
                                      (A)
Continuous Monitoring Device
                                      (B)
                    Capital/Startup Cost for One Respondent
                                      (C)
                           Number of New Respondents
                                      (D)
                         Total Capital/Startup Cost,
                                    (B X C)
                                      (E)
                    Annual O&M Costs for One Respondent
                                      (F)
                      Number of Respondents with O&M
                                      (G)
                                Total O&M,
                                    (E X F)
N/A
                                      N/A
                                      N/A
                                      N/A
                                     $50.
                                       1
                                     $50.

                                     Total
                                     $50.

      The total capital/startup costs for this ICR are zero.  This is the total of column D in the above table.

	The total operation and maintenance (O&M) costs for this ICR are $50.  This is the total of column G.

	The average annual cost for capital/startup and operation and maintenance costs to industry over the next three years of the ICR is estimated to be $50. These are recordkeeping costs.

      6(c)  Estimating Agency Burden and Cost

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      The only costs to the Agency are those costs associated with analysis of the reported information.  The EPA compliance and enforcement program includes activities such as: the examination of records maintained by the respondents; periodic inspection of sources of emissions; and the publication and distribution of collected information.
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      The average annual Agency cost during the three years of the ICR is estimated to be $1,555.
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      This cost is based on the average hourly labor rate as follows:
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      Managerial	$62.27   (GS-13, Step 5, $38.92 x 1.6)
		Technical	$46.21   (GS-12, Step 1, $28.88 x 1.6)
		Clerical	$25.01   (GS-6, Step 3, $15.63 x 1.6)
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These rates are from the Office of Personnel Management (OPM) "2011 General Schedule" which excludes locality rates of pay.  The rates have been increased by 60 percent to account for the benefit packages available to government employees.  Details upon which this estimate is based appear below in Table 2: Average Annual EPA Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).
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      6(d)  Estimating the Respondent Universe and Total Burden and Costs

	Based on our research for this ICR, on average over the next three years, approximately one existing respondent will be subject to the standard.  It is estimated that no additional respondent will become subject to the standard.  The overall average number of respondents,         as shown in the table below, is one per year.

	The number of respondents is calculated using the following table which addresses the three years covered by this ICR.

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Number of Respondents
--------------------------------------------------------------------------------
Year
--------------------------------------------------------------------------------
(A)
--------------------------------------------------------------------------------
Number of New Respondents
--------------------------------------------------------------------------------
(B)
--------------------------------------------------------------------------------
Number of Existing Respondents
--------------------------------------------------------------------------------
(C)
--------------------------------------------------------------------------------
Number of Existing Respondents That Keep Records But Do Not Submit Reports
--------------------------------------------------------------------------------
(D)
--------------------------------------------------------------------------------
Number of Existing Respondents That Are Also New Respondents
--------------------------------------------------------------------------------
(E)
--------------------------------------------------------------------------------
Number of Respondents
--------------------------------------------------------------------------------
(E=A+B+C-D)
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
2
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
3
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
Average
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1

      Column D is subtracted to avoid double-counting respondents.  As shown above, the average Number of Respondents over the three-year period of this ICR is one.

      The total number of annual responses per year is calculated using the following table:

--------------------------------------------------------------------------------
Total Annual Responses
--------------------------------------------------------------------------------
(A)
--------------------------------------------------------------------------------
Information Collection Activity
--------------------------------------------------------------------------------
(B)
--------------------------------------------------------------------------------
Number of Respondents
--------------------------------------------------------------------------------
(C)
--------------------------------------------------------------------------------
Number of Responses
--------------------------------------------------------------------------------
(D)
--------------------------------------------------------------------------------
Number of Existing Respondents That Keep Records But Do Not Submit Reports
--------------------------------------------------------------------------------
(E)
--------------------------------------------------------------------------------
Total Annual Responses
--------------------------------------------------------------------------------
E=(BxC)+D
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Initial notification
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
Notification of performance evaluation
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
Notification of compliance status
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
Performance evaluation reports
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
Startup, shutdown, malfunction report
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
4
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
Semiannual summary report
--------------------------------------------------------------------------------
1
--------------------------------------------------------------------------------
2
--------------------------------------------------------------------------------
0
--------------------------------------------------------------------------------
2
--------------------------------------------------------------------------------

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Total
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2

      The number of Total Annual Responses is 2.

      The total annual labor costs are $3,526.  Details regarding these estimates may be found below in Table 1: Annual Respondent Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).

      6(e)  Bottom Line Burden Hours Burden Hours and Cost Tables

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      The detailed bottom line burden hours and cost calculations for the respondents and the Agency are shown in Tables 1 and 2, respectively, and summarized below.
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            (i)  Respondent Tally

      The total annual labor hours are 37, at a cost of $3,526.  Details regarding these estimates may be found below in Table 1: Annual Respondent Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).

      Furthermore, the annual public reporting and recordkeeping burden for this collection of information is estimated to average 19 hours per response.
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      The total annual capital/startup and O&M costs to the regulated entity are $50. The cost calculations are detailed in Section 6(b)(iii), Capital/Startup vs. Operation and Maintenance (O&M) Costs.
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            (ii)  The Agency Tally
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      The average annual Agency burden and cost over next three years is estimated to be 35 labor hours, at a cost of $1,555.  See below Table 2: Average Annual EPA Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal).

      6(f)  Reasons for Change in Burden

      There is no change in labor hours in this ICR compared to the previous ICR.  This is due to two considerations: 1)  the regulations have not changed over the past three years and they are not anticipated to change over the next three years; and 2) the growth rate for the industry is very low, negative or nonexistent, so there is no significant change in the overall burden.

      There is an increase in respondent and Agency costs resulting from labor rate increases since the last renewal.  This ICR uses updated labor rates from the most recently available data for each of the three labor categories.

      6(g)  Burden Statement

      The annual public reporting and recordkeeping burden for this collection of information is estimated to average 19 hours per response.  "Burden" means the total time, effort, or financial resources expended by persons to generate, maintain, retain, disclose or provide information to or for a Federal agency.  This includes the time needed to review instructions; develop, acquire, install, and utilize technology and systems for the purposes of collecting, validating, and verifying information, processing and maintaining information, and disclosing and providing information; adjust the existing ways to comply with any previously applicable instructions and requirements; train personnel to be able to respond to a collection of information; search data sources; complete and review the collection of information; and transmit or otherwise disclose the information.

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      An agency may not conduct or sponsor, and a person is not required to respond to, a collection of information unless it displays a valid OMB Control Number.  The OMB Control Numbers for EPA's regulations are listed at 40 CFR part 9 and 48 CFR chapter 15.

      To comment on the Agency's need for this information, the accuracy of the provided burden estimates, and any suggested methods for minimizing respondent burden, including the use of automated collection techniques, EPA has established a public docket for this ICR under Docket ID Number EPA-HQ-OECA-2011-0262.  An electronic version of the public docket is available at http://www.regulations.gov/ which may be used to obtain a copy of the draft collection of information, submit or view public comments, access the index listing of the content of the docket, and to access those documents in the public docket that are available electronically.  When in      the system, select "search" than key in the docket ID number identified in this document.             The documents are also available for public viewing at the Enforcement and Compliance Docket and Information Center in the EPA Docket Center (EPA/DC), EPA West, Room 3334, 1301 Constitution Avenue, N.W., Washington, DC.  The EPA Docket Center Public Reading Room      is open from 8:30 a.m. to 4:30 p.m., Monday through Friday, excluding legal holidays.                 The telephone number for the Reading Room is<PHONE_NUMBER>, and the telephone number for    the Enforcement and Compliance Docket and Information Center Docket is<PHONE_NUMBER>.  Also, you can send comments to the Office of Information and Regulatory Affairs, Office of Management and Budget, 725 17th Street, N.W., Washington, DC 20503, Attention: Desk Officer for EPA.  Please include the EPA Docket ID Number EPA-HQ-OECA-2011-0262 and OMB Control Number 2060-0519 in any correspondence.

Part B of the Supporting Statement

This part is not applicable because no statistical methods were used in collecting this information.

Table 1:  Annual Respondent Burden and Cost  -  NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal)

                                  Burden item
                                      (A)
                          Person hours per occurrence
                                      (B)
                  No. of occurrences per respondent per year
                                      (C)
                     Person hours per respondent per year
                                    (C=AxB)
                                      (D)
                           Respondents per year  [a]
                                      (E)
                       Technical person- hours per year
                                    (E=CxD)
                                      (F)
                       Management person hours per year
                                   (Ex0.05)
                                      (G)
                        Clerical person hours per year
                                    (Ex0.1)
                                      (H)
                                  Total Cost
                                  Per year b

1.  Applications
                                      N/A

2.  Survey and Studies
                                      N/A

3.  Reporting requirements

     A.  Read instructions [c]
                                       4
                                       1
                                       4
                                       0
                                       0
                                       0
                                       0
                                                                             $0
     B.  Process/review information [d]
                                       4
                                       2
                                       8
                                       1
                                       8
                                     0.40
                                     0.80
                                                                        $881.54
     C.  Write Report

        Initial notification [c]
                                       2
                                       1
                                       2
                                       0
                                       0
                                       0
                                       0
                                                                             $0
        Notification of performance evaluation [c]
                                       2
                                       1
                                       2
                                       0
                                       0
                                       0
                                       0
                                                                             $0
        Notification of compliance status [c]
                                       2
                                       1
                                       2
                                       0
                                       0
                                       0
                                       0
                                                                             $0
        Performance evaluation reports [c]
                                       2
                                       1
                                       2
                                       0
                                       0
                                       0
                                       0
                                                                             $0
        Startup, shutdown, malfunction (SSM) report [e]
                                       1
                                       4
                                       4
                                       0
                                       0
                                       0
                                       0
                                                                             $0
        Semiannual summary report [f]
                                       4
                                       2
                                       8
                                       1
                                       8
                                     0.40
                                     0.80
                                                                        $881.54
Subtotal  for Reporting  Requirements

                                     18.4

4.  Recordkeeping requirements

     A.  Read instructions
                                       4
                                       1
                                       4
                                       0
                                       0
                                       0
                                       0
                                                                             $0
     B.  Plan activities
                                       8
                                       1
                                       8
                                       1
                                       8
                                     0.40
                                     0.80
                                                                        $881.54
     C.  Implement activities

           Control devices

               Design analysis
                                      15
                                       1
                                      15
                                       0
                                       0
                                       0
                                       0
                                                                             $0
               Performance evaluation
                                      40
                                       1
                                      40
                                       0
                                       0
                                       0
                                       0
                                                                             $0
               Equipment inspection
                                       1
                                      52
                                      52
                                       0
                                       0
                                       0
                                       0
                                                                             $0
               Monitoring activities
                                       1
                                      52
                                      52
                                       0
                                       0
                                       0
                                       0
                                                                             $0
               Maintenance
                                       2
                                      52
                                      104
                                       0
                                       0
                                       0
                                       0
                                                                             $0
     D.  Develop record system

              Develop SSM plan
                                       8
                                       1
                                       8
                                       0
                                       0
                                       0
                                       0
                                                                             $0
              Control equipment/maintenance plan
                                      12
                                       1
                                      12
                                       0
                                       0
                                       0
                                       0
                                                                             $0
     E.  Time to enter information

              Control equipment testing
                                       1
                                       1
                                       1
                                       0
                                       0
                                       0
                                       0
                                                                             $0
              Control equipment inspection
                                      0.5
                                      52
                                      26
                                       0
                                       0
                                       0
                                       0
                                                                             $0
              Control equipment monitoring
                                      0.5
                                      52
                                      26
                                       0
                                       0
                                       0
                                       0
                                                                             $0
     F.  Time to train personnel

              Control equipment inspection and Monitoring
                                      40
                                       1
                                      26
                                       0
                                       0
                                       0
                                       0
                                                                             $0
     G.  Store, file and maintain records [g]
                                       2
                                       2
                                       4
                                       1
                                       4
                                     0.20
                                     0.40
                                                                        $440.77
     H.  Retrieve records/reports [h]
                                       2
                                       2
                                       4
                                       1
                                       4
                                     0.20
                                     0.40
                                                                        $440.77
Subtotal  for Recordkeeping Requirements

                                     18.4

TOTAL LABOR BURDEN AND COST (rounded)

                                      37
                                                                        $3,526

Assumptions:
[a]  We have assumed that there is approximately one existing source currently subject to this rule.  There will be no additional new source that will become subject to the rule over the three-year period of this ICR.
[b]  This ICR uses the following labor rates:  $121.42 per hour for Managerial labor; $99.14 per hour for Technical labor, and $49.81
per hour for Clerical labor.  These rates are from the United States Department of Labor, Bureau of Labor Statistics, September, 2011 "Table 2. Civilian Workers, by Occupational and Industry group."  The rates are from column 1, "Total Compensation."  The rates have been increased by 110 percent to account for the benefit packages available to those employed by private industry.
[c]  This is a one-time only activity.
[d]  We have assumed that it will take the respondent 4 hours twice a year to process and review information.
[e]  We have assumed that it will take each respondent 1 hour four times a year to write SSM report.
[f]   We have assumed that it will take the respondent 4 hours two times a year to complete the semiannual report.
[g]  We have assumed that the respondent will take 2 hours two times per year to store, file and maintain records.
h  We have assumed that the respondent will take 2 hours two times per year to retrieve records/reports.

Table 2:  Average Annual EPA Burden and Cost - NESHAP for Semiconductor Manufacturing (40 CFR Part 63, Subpart BBBBB) (Renewal)

                                   Activity
                                      (A)
                       EPA person- hours per occurrence
                                      (B)
                     No. of occurrences per plant per year
                                      (C)
                     EPA person- hours per plant per year
                                    (C=AxB)
                                      (D)
                             Plants per year  [a]
                                      (E)
                       Technical person- hours per year
                                    (E=CxD)
                                      (F)
                       Management person-hours per year
                                   (Ex0.05)

                                      (G)
                        Clerical person-hours per year
                                    (Ex0.1)
                                      (H)
                                  Cost, $ [b]
Review initial notification reports
                                       8
                                       1
                                       8
                                       0
                                       0
                                       0
                                       0
                                                                            $0
Review notification of compliance status
                                      10
                                       1
                                      10
                                       0
                                       0
                                       0
                                       0
                                                                            $0
Review semiannual summary reports [c]
                                      15
                                       2
                                      30
                                       1
                                      30
                                      1.5
                                       3
                                                                     $1,554.74
Review notification of performance test d
                                       4
                                       1
                                       4
                                       0
                                       0
                                       0
                                       0
                                                                            $0
Attend initial performance tests
                                      120
                                       1
                                      120
                                       0
                                       0
                                       0
                                       0
                                                                            $0
Review test results [e]
                                      10
                                       1
                                      10
                                       0
                                       0
                                       0
                                       0
                                                                            $0
TOTAL ANNUAL BURDEN AND COST (rounded)

                                      35
                                                                        $1,555
Assumptions:
[a]  We have assumed that there is approximately one existing sources currently subject to this rule.  There will be no additional new source that will become subject to the rule each year over the three-year period of this ICR.
[b]  This cost is based on the following labor rates which incorporate a 1.6 benefits multiplication factor to account for government overhead expenses: $62.27 for Managerial (GS-13, Step 5, $38.92 x 1.6), $46.21 for Technical (GS-12, Step 1, $28.88 x 1.6), and $25.01 Clerical (GS-6, Step 3, $15.63 x 1.6).  These rates are from the Office of Personnel Management (OPM) "2011 General Schedule" which excludes locality rates of pay.
[c]  We have assumed that the respondent will take 15 hours two times a year to review the semiannual summary reports.
[d]  We have assumed that it will take each respondent 4 hours one time a year to review notification of performance tests.
[e]   We have assumed that it will take each respondent 10 hours one time a year to review test results.