afshin alipour
Research Assistant at The University of Texas at Dallas
phd candidate mechanical engineering
interested experienced design mem device , control system , mechatronic system , fabrication macro microscale . able obtain work authorization u .
The University of Texas at Dallas
https://www.linkedin.com/company/university-of-texas-at-dallas
Design, fabrication, characterization, and control of MEMS nanopositioners
Implementation of non-raster AFM scanning patterns
Fabrication of integrated AFM tips
Richardson, Texas, United States
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Research Assistant
The University of Texas at Dallas
https://www.linkedin.com/company/university-of-texas-at-dallas
Linear systems
Richardson, Texas
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Teaching Assistant
University of Tehran
https://www.linkedin.com/company/university-of-tehran
Dynamics
Tehran, Iran
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Teaching Assistant
Doctor of Philosophy - PhD
Design, fabrication and control of microelectromechanical systems
Mechanical Engineering
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The University of Texas at Dallas
https://www.linkedin.com/school/university-of-texas-at-dallas/
Master of Science - MS
Design, fabrication and control of a novel lower-limb rehabilitation robot
Mechanical Engineering
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University of Tehran
https://www.linkedin.com/school/university-of-tehran/
Bachelor of Science - BS
Mechanical Engineering
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Amirkabir University of Technology - Tehran Polytechnic
https://www.linkedin.com/school/amirkabir-university-of-technology---tehran-polytechnic/
In this article, we replace the Z axis of the piezotube of a conventional Ultrahigh-Vacuum (UHV) Scanning Tunneling Microscope (STM) with a one-degree-of-freedom Microelectromechanical-System (MEMS) nanopositioner. As a result, a hybrid system is realized in which motions in the XY plane are carried out by the piezotube, while the MEMS device performs the Z-axis positioning with a smaller footprint and higher sensitivity. With the proposed system and a feedback loop, STM imaging is conducted on an H-passivated Si (100)-2×1 sample in a UHV condition, demonstrating that this on-chip STM is conducive to atomic precision scanning tunneling microscopy.
Atomic precision imaging with an on-chip scanning tunneling microscope integrated into a commercial ultrahigh vacuum STM system
Journal of Vacuum Science & Technology B
https://avs.scitation.org/doi/abs/10.1116/6.0001107
In this paper, we demonstrate an Atomic Force Microscope (AFM) cantilever array featuring three active microcantilevers for parallel imaging in tapping mode (TM). The cantilevers are equipped with on-chip piezoelectric actuation/sensing elements in addition to an electrothermal actuator to enable z-axis positioning. To minimize vibrational coupling in the array, the cantilevers are designed with different dimensions to have distinct resonant frequencies. The measured resonant frequencies of the cantilevers are 29.9 kHz, 35.6 kHz, and 35.08 kHz. The electrical cross-coupling is successfully mitigated. Three tapping mode AFM images are obtained through subsequent use of the cantilevers in the array.
Design, Fabrication and Characterization of Active Atomic Force Microscope Cantilever Arrays
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
https://ieeexplore.ieee.org/abstract/document/9375345
Slow Z-axis dynamics of Scanning Tunneling Microscope (STM) is a key contributing factor to the slow scan speed of this instrument. A great majority of STM systems use piezotube nanopositioners for scanning. The piezotube bulkiness along with the mass of STM tip assembly restrict the overall Z-axis bandwidth of the system to about 1kHz. This limited bandwidth slows down the STM response to the sample topography changes. In this paper, we report a microfabrication process to build a Microelectromechanical-System (MEMS) nanopositioner for Z-axis positioning in STM with a tenfold bandwidth, and a similar range of motion. The MEMS device features an integrated nanometer-sharp in-plane Si tip, compatible with conventional batch fabrication processes. In addition, a novel electrical isolation technique is developed to electrically isolate the tip from the rest of this device. This enables us to provide a separate routing for tunneling current signal, enabling potential applications in parallelism. The fabricated MEMS device achieves 1.6μ m motion with its first in-plane resonance beyond 10kHz. The capability of this MEMS nanopositioner to replace the Z-axis of STMs is demonstrated through establishing controlled and stable tunneling current on a graphite sample in ambient conditions.
A MEMS Nanopositioner With Integrated Tip for Scanning Tunneling Microscopy
Journal of Microelectromechanical Systems
https://ieeexplore.ieee.org/abstract/document/9336220/
Atomic force microscope (AFM) is a powerful instrument, which has been successfully employed in a myriad of applications from imaging to lithography, over the last decades. Despite its widespread use, low throughput of the AFM remains one of its major limitations along with slow scan rates in tapping mode. In this work, we propose a microfabricated cantilever array composed of five cantilevers, each equipped with on-chip piezoelectric displacement sensors and an actuator for parallel imaging in tapping mode. The cantilevers are designed to have separate resonance frequencies in order to effectively minimize the vibrational coupling. The measured resonance frequencies range from 85.34 kHz to 107.78 kHz, and more than 5 kHz resonant frequency separation is achieved in the neighboring cantilevers. Vibrational coupling is mitigated by over two orders of magnitude compared to arrays with identical cantilevers. The common feedthrough problem in this type of active system is addressed by configuring the displacement sensors differentially. Finally, one of the cantilevers in the array is successfully employed for tapping mode AFM imaging.
Design, Fabrication, and Characterization of a Piezoelectric AFM Cantilever Array
2019 IEEE Conference on Control Technology and Applications (CCTA)
https://ieeexplore.ieee.org/abstract/document/8920686
Limited Z-axis bandwidth of piezotube scanners employed in conventional Scanning Tunneling Microscopes (STMs) has been a major limiting factor in achieving high scan speeds in STM applications. Slow Z-axis dynamics of typical piezotube scanners combined with the weight of the STM tip/tip holder assembly, that the scanner has to carry, substantially limit the achievable Z-axis bandwidth in both imaging and lithography modes. To tackle this issue, we propose a high bandwidth microelectromechanical-system-based nanopositioner to be integrated into an existing STM scanner. The device is designed to replace the STM tip and fine Z-positioning mechanisms in the conventional STM setup, while providing an order of magnitude higher bandwidth in Z axis. The device is microfabricated using double silicon-on-isolator technology, and standard cleanroom processes. Experiments show that tunneling current between the device tip and a highly ordered pyrolytic graphite sample can be successfully established and maintained in air using the proposed device in a feedback loop. Results indicate that the proposed device uniquely combines a very high resolution and a large stroke with a substantially larger Z-axis bandwidth compared to that of conventional STM piezotube scanners, enabling higher scanning speeds in STM operations.
A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy
Review of Scientific Instruments
https://aip.scitation.org/doi/full/10.1063/1.5109900
This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based probe scanner proposed to function as an on-chip atomic force microscope (AFM). The device comprises an in-plane stage with electrostatic actuators and electrothermal displacement sensors. The stage is able to precisely position an AFM probe over a sample to perform tapping-mode AFM imaging. For implementation, a standard silicon-on-insulator (SOI) microfabrication process is used. In a previously reported design, the embedded AFM probe featured only one piezoelectric transducer for simultaneous actuation and sensing, making its use in imaging problematic. To address this issue, the new design features separate actuation and sensing AlN piezoelectric transducers. An extra electrode is also incorporated on the probe that enables canceling the electrical feedthrough from the actuation to sensing. To accommodate the extra signal routing paths, mechanical design of the probe scanner is modified. Device characterization reveals an in-plane displacement range of 8 μm × 7 μm with a bandwidth of up to 2.7 kHz. The frequency-domain behavior of the AFM probe is also studied and feedthrough cancellation is performed at the resonant frequency of 127.35 kHz.
Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy
2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
https://ieeexplore.ieee.org/abstract/document/8860968
Atomic force microscope (AFM) provides a unique possibility in nanoscience research and development for interrogation and manipulation of matter at nanoscale. Miniaturization of AFM significantly reduces the manufacturing cost and breaks the barrier to widespread adoption of this scientific instrument. This paper presents the characterization and control of a novel microelectromechanical system (MEMS)-based AFM. For in-plane motion, the device is equipped with a micro stage with integrated electrostatic actuators and electrothermal sensors. For use in taping-mode AFM imaging, a microcantilever is embedded within the device, featuring a piezoelectric layer for actuation. Positive position feedback (PPF) controller is used to attenuate the highly resonant dynamics of the stage. Scanning performance of device is evaluated by tracking a raster pattern where a 50 Hz triangular signal is applied to the actuators along the X axis. To reduce the tracking error, turnaround points of triangular signal are smoothed by using an optimization method. Moreover, the closed-loop bandwidth is increased with inversion-based feedforward technique. A 50Hz optimal reference signal combined with an inversion-based feedforward technique results in a fivefold decrease in root mean square of tracking error compared with triangular reference signal.
A Feedback Controlled MEMS Probe Scanner for On-chip AFM
IFAC-PapersOnLine
https://www.sciencedirect.com/science/article/pii/S2405896319316817
We demonstrate the application of the internal model principle in tracking a sequential cycloid trajectory to achieve video-rate atomic force microscope (AFM) imaging. To generate a sequential cycloid pattern, one axis of the nanopositioner traces a sinusoidal signal superimposed on a slow triangular wave. Discontinuities at turning points induce large peaks in the steady-state tracking error. To address this issue, a smooth trajectory is designed to reduce the magnitude of error by 60 nm compared with the triangular wave. This trajectory reduces the magnitude of error 10 times. The tracking controller includes the dynamics of the harmonic waveforms and the ramp signal as well as higher order harmonics of the scanning frequency, and an integrator to cope with the system nonlinearities at low frequencies. We perform experiments on a two degree of freedom microelectromechanical system nanopositioner at various scanning frequencies ranging from 500 to 2580 Hz within a scan area of 5 μm x 10 μm. The root-mean-square value of tracking error remains below 6.1 nm with a pitch size of 44.2 nm. We acquire time-lapse AFM images in contact mode at scan rates as high as 20 frames per second.
Video-Rate Non-Raster AFM Imaging With Cycloid Trajectory
IEEE Transactions on Control Systems Technology
https://ieeexplore.ieee.org/abstract/document/8575120
We report sequential atomic force microscope (AFM) imaging with a cycloid scan pattern where one lateral axis of the nanopositioner follows a sinusoid superimposed on a slow triangular signal. Due to the abrupt slope change in a triangular signal, large peaks appear in the tracking error. To smoothen the sharp turning points and reduce the error, an optimization technique is employed. To achieve a highperformance tracking, we utilized an internal model controller which includes a model of the reference signals while additional internal models are also added to the controller to deal with the system nonlinearities. The experiment is conducted on a two degrees of freedom microelectromechanical system nanopositioner within a scan area of 5 μm×10 μm and the pitch size of 44.2 nm as the scanning time is 80.6 msec. The peak of tracking error in x-axis is negligible due to the optimal trajectory while the root mean square value of tracking error is obtained as 4.9 nm and 4.4 nm for x- and y-axis, respectively. A sequence of contact mode constant height AFM images are acquired at 12.4 fps.
Sequential Cycloid Scanning for Time-resolved Atomic Force Microscopy
2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)
https://ieeexplore.ieee.org/abstract/document/8452302
We demonstrate high-performance tracking of a cycloid trajectory for video-rate atomic force microscopy imaging by employing internal model control. To acquire sequential images using cycloid scanning, the stage needs to follow a slow periodic triangular wave superimposed on a sinusoidal signal along one axis with the remaining axis tracking a purely sinusoidal signal. The sharp turnarounds in the triangular signal result in a large tracking error. We utilize a trapezoidal signal to address this issue. To obtain high-precision positioning, the controller comprises the internal model of harmonic waveforms and the ramp signal plus additional integrator to compensate for stage nonlinearities. The controller is implemented on a two degree of freedom microelectromechanical system nanopositioner and operated at scan frequencies ranging from 500 Hz to 2580 Hz in a window size of 5 μm by 10 μm. While the pitch size of the trajectory is set to be 46 nm, the RMS value of tracking error remains below 7 nm. The highest scan rate of 20 frames per second is achieved at f=2580 Hz with the maximum transient tracking error of 15 nm.
Internal Model Control of Cycloid Trajectory for Video-Rate AFM Imaging with a SOI-MEMS Nanopositioner
2018 Annual American Control Conference (ACC)
https://ieeexplore.ieee.org/abstract/document/8431682
Continuous passive motion (CPM) is a treatment used to prevent stiffness of a joint caused by injury or surgery. Applying this method by rehabilitation robots improves the accuracy of the motion in addition to the length of the training. In addition, ankle is an important joint which has to stand the body weight and tolerate large forces during daily activities and exercise. In this paper, a rehabilitation robot is designed and fabricated with three generalized coordinates to make foot inversion-eversion (I/E). To test the device, CPM is then implemented on the I/E motion of the ankle. The results show that the robot can move the joint in the desired path accurately.
A rehabilitation robot for continuous passive motion of foot inversion-eversion
2016 4th International Conference on Robotics and Mechatronics (ICROM)
https://ieeexplore.ieee.org/abstract/document/7886763
In this research, influences of intermolecular interactions on the behavior of nanobeams are studied. A sudden applied voltage actuates the clamped-clamped nanobeam. The effects of electrostatic actuation, intermolecular forces, midplane stretching, fringing field effect and residual stress are considered. Initially, the governing equation is nondimensionalized and the partial differential equation of motion is converted to a nonlinear ordinary differential equation by means of Galerkin’s method. Afterwards, the nonlinear ordinary differential equation of motion is solved by means of homotopy analysis method. To validate the model, the response of a sample beam was compared with literature. Finally, the effects of various parameters on the nonlinear frequency of the response are studied. The results indicate that the nonlinear frequency of oscillations significantly decreases by increasing intermolecular effects.
Analytical solution to nonlinear behavior of electrostatically actuated nanobeams incorporating van der Waals and Casimir forces
Scientia Iranica. Transaction F
http://scientiairanica.sharif.edu/article_3723.html
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Beecherl merit-based fellowship for graduate students at Eric Jonsson School
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Beecherl merit-based fellowship for graduate students at Eric Jonsson School
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Beecherl merit-based fellowship for graduate students at Eric Jonsson School
Advanced Dynamics
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Advanced Measurement Methods
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Advanced Vibrations
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Estimation & System Identification
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Haptics
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Linear Systems
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Nonlinear Control Systems
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Computer Aided Design (CAD)
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Convex Optimization (Audited)
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Engineering Optimization
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Introduction to MEMS
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Machine Learning (Audited)
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Modeling and Simulation
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Optimal Control and Dynamic Programing
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Robust Control
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Torbumachines
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The aim of this project is to develop new MEMS nanopositioners which can replace the currently piezo-electric nanopositioners used for scanning probe microscopy. As the result, not only artifacts existing in piezo actuators like creep and hysteresis will be eliminated, but also the microscopy can be achieved at higher speeds due to miniaturizing.
High-bandwidth MEMS nanopositioners for scanning probe microscopy
The scanning probe microscope is a miniaturized atomic force microscope (AFM) which has both actuation and sensing mechanisms on-chip. Therefore, AFM throughput can increase not only due to having higher bandwidth, but also due to use as an array. In this project, we characterized the mechanical properties of a novel scanning probe microscope with on-chip feedthrough cancellation mechanism, including static response, frequency response of the system and sensors, sensor calibration factors, and mode shapes of its cantilever using tools such as laser doppler vibrometer and FFT analyzer.
Characterization of a novel scanning probe microscope with on-chip feedthrough cancellation
In this project, we developed a novel endoscopic robot by combining two previous pieces of work. The developed robot consisted of a novel joint which made it possible for the robot to switch its operation mode between insertion/removal and operational configurations. As a result, the robot was able to carry various types of operation instruments. In addition, the robot's linkage was made up of rotatable snake-bone-like segments which produced rotation for the robot by using just two strings. As a result, workspace of the robot increased compared to similar counterparts.
Design and 3D-printing of a novel natural orifice transluminal endoscopic surgery robot
Parallel atomic force microscopy can be realized by arrays of active cantilevers which contain both on-chip actuation and sensing. However, having identical tips for all cantilevers in the same array is challenging. In addition, adding tips to the cantilevers one by one is not economical and can be time consuming, In this project, an active cantilever array was designed and fabricated where integrated tip were realized during fabrication of the array. As a result, consistency among the tips was guaranteed.
Fabrication of integrated tips of active cantilevers for atomic force microscopy
One method to increase the speed of currently available atomic force microscopes (AFM) is to scan the sample surface with a non-raster pattern. In this projects, we implemented a novel non-raster pattern, i.e. cycloid, which consists of sinusoidal waves in X and Y directions, and we could achieve AFM image rates as high as 20 fps.
Video-rate atomic force microscopy
In this project, I used dynamic programming and approximate dynamic programming methods
to design an automatic feedback controller for landing the booster stage of a reusable rocket. The project was inspired by the SpaceX efforts to develop a set of new technologies for an orbital launch system that may be reused many times in a manner similar to the reusability of aircraft, which would dramatically reduce costs of various space missions.
Stochastic optimal control of a rocket landing
A linkage is a closed-loop chain of rigid bodies jointed to each other. Four-bar mechanism is the simplest and the most commonly used type of linkages which consists of four rigid links connected to each other with revolute joints. Path generation synthesis which was the subject of this study is to determine the lengths of links and the position of two fixed joints in such a way that a specific point defined on plane attached to the coupler link generates a desired curve. 
An objective function was defined which measured the closeness of generated curve to the desired path. Minimization of this objective function would result in an optimal linkage which approximates the desired path. In this project, we used an evolutionary algorithm (Differential Evolution) to perform the optimization process for the approximate synthesis of the four-bar mechanism.
Optimization of four-bar path generator linkages
Through my master thesis, we developed a new four degree-of-freedom (DOF) stationary-based robot for simultaneous rehabilitation of knee and ankle. Sufficient DOFs of the robot makes the ankle recover in its natural and unconstrained trajectory which is beneficial for gait recovery. In addition, incorporating knee joint as well as ankle joint makes it possible to apply different patterns of stretching. The robot was designed and fabricated, and a rehabilitation training (continuous passive motion) was successfully given to a subject using the robot.
Design, fabrication, and control of a novel robot for simultaneous ankle and knee rehabilitation
In this project, the behavior of electrostatically actuated nanobeams was studied. Initially, the governing equation was nondimensionalized and the partial differential equation of motion was converted to a nonlinear ordinary differential equation by means of Galerkin’s method. Afterwards, the nonlinear ordinary differential equation of motion was solved by means of homotopy analysis method. To validate the model, the response of a sample beam was compared with literature. Finally, the effects of various parameters on the nonlinear frequency of the response were studied. The results indicated that the nonlinear frequency of oscillations significantly decreases by increasing intermolecular effects.
Investigation of vibration behavior of nanobeams using homotopy analysis method
In this project, we aimed to use the linear systems analysis to actively control the suspension systems. First, we developed a three degrees of freedom model of a vehicle suspension system. After obtaining the state space representation, we designed a reduced order observer for the system's states. Then, a controller was designed to reject the perturbations in the system based on state feedback and output feedback methods.
Suspension control of a four-wheel vehicle
https://ca.linkedin.com/in/vahid-nourian-4b5995bb
Waterloo, ON
Vahid Nourian
Graduate Research and Teaching Assistant
https://www.linkedin.com/in/aarizhazari
Greater Houston
Aariz Hazari
Mechanical Engineer
https://ir.linkedin.com/in/alireza-abdollahi
Iran
Alireza Abdollahi
PhD candidate in electrical engineering – control (Aerial robotics field) at Sharif University of Technology
https://www.linkedin.com/in/edmund-narh-458015184
San Francisco Bay Area
Edmund Narh
Student at UC Berkeley College of Engineering
https://www.linkedin.com/in/edmund-narh-b2b81382
San Francisco Bay Area
Edmund Narh
Mechanical Engineer
https://www.linkedin.com/in/mohammadreza-mahmoudi-556059b3
United States
Mohammadreza Mahmoudi
Arizona State University
https://www.linkedin.com/in/masoud-arabghahestani-2b3b74131
Lexington, KY
Masoud Arabghahestani
Application and Design Engineer| Engineering Analyst | Lean Operation Certified | Outdoor Enthusiast
https://nl.linkedin.com/in/hadibalaghi
Eindhoven
Hadi Balaghiinaloo
Mechatronic Design Engineer | Being part of progress @ASML
https://www.linkedin.com/in/rayna-alizadeh
Greater Fayetteville, AR Area
Rayna Alizadeh
Research assistant at University of Arkansas
https://ca.linkedin.com/in/ptajik
Vancouver, BC
Peyman Tajik, EIT
Construction Officer at BC Hydro
https://www.linkedin.com/in/jerryklai
Danville, CA
Jerry Lai
Instrument Reliability Engineer at Corteva Agriscience
https://www.linkedin.com/in/arie-belldegrun-3a50501a4
Los Angeles, CA
arie belldegrun
Chairman Of The Board at Allogene Therapeutics
https://www.linkedin.com/in/speice-ruby-9803801b4
Camden, SC
Speice Ruby
Sales Manager at Shenzhen Letton Digital Technology Co., Limited
https://ir.linkedin.com/in/atefeh-yari-546b61174
Iran
atefeh yari
Chemistry student
https://in.linkedin.com/in/arjun-bavalia-0148821b7
Gurugram
Arjun Bavalia
Senior Creative Designer at Studio34 Designart (P) Ltd.
https://www.linkedin.com/in/dianamaronen
Salt Lake City Metropolitan Area
Diana Maronen
Sr. Recruiter, Professional Recruitment at Disney Parks, Experiences and Products (DPEP) #WeChangeLives #DisneyRecruiting #Disney
https://ir.linkedin.com/in/sina-kazemi-8b7271a8
Iran
sina kazemi
student
https://ir.linkedin.com/in/sepehr-maleki-27abbb198
Tehran, Iran
Sepehr Maleki
Teaching Assistant at University of Tabriz
https://ir.linkedin.com/in/tohid-moradi-art-55bb14169
Iran
Tohid Moradi_ART
A Freelance Art Teacherمدرس خوشنویسی با خودکار
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I'm Russian. And I don't have words.I didn't choose this president. No one from my friends and family and everyone I know voted for him.People in…
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یکی از مواردی که در سال‌های گذشته بی‌نهایت برای من کارساز بوده، مهارت‌های زبان انگلیسی است. تسلط به مهارت‌های گفتاریِ زبان انگلیسی به من کمک کرد تا…
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I am pleased to share our recent paper in Journal of Coatings as part of a collaboration between UNLV, Politecnico di Milano, and Iowa State…
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Mashhad County
Afshin Alipour
Co-founder Arya Vending
https://www.linkedin.com/in/afshin-alipour-b8ab4b1ab
Marietta, GA
Afshin Alipour
Car tech at Edvoyles
https://www.linkedin.com/in/afshin-alipour-161985133
United States
Afshin Alipour
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Mechanical Engineering Internships in California, USA
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Microelectromechanical Systems (MEMS) Networking
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